Research On Wireless Powered Micro Electro Mechanical Robot Actuated By Lamb Wave Resonators

Precision operation and task execution in a limited micro-scale space has always been a hotspot in academic and engineering circles.As an efficient and feasible solution,micro robot has attracted wide attention.Simple and portable wireless energy supply system,precise control and small volume are desired by robot miniaturization.Here,this research develop an asymmetric-pattern microscale acoustic device,Lamb wave resonator with about 148 MHz working frequency,and we demonstrate its applications as two-dimensional wireless driver for swimming robots in liquid conditions.Theoretical and experimental studies show that when wirelessly actuated by RF AC signal,the resonator would generate strong acoustic streaming with highly directional drag forces.The main research contents and results of this paper are as follows:1.A single reflecting grating Lamb wave based MEMS robot driver was designed.The volume of the acoustic driver is 450×410×1.5μm~3,which can motivate the motions of an 8×8×1mm~3 floating board,showing giant driving force even under applied powers of 100m W.The acoustic device is fabricated with standard Micro Electro Mechanical Systems(MEMS)process in batch,that allows layout of multiple devices of designed patterns and frequencies.2.The wireless power supply module of the MEMS robot driver was designed,two ideas of wireless energy transmission system impedance matching were proposed,and the design of energy transmission system was optimized from the perspective of engineering practice.3.Four parallelly connected and single edge LWRs were used to be the robot actuator,and by multiplexing the device array,two motion modes including straight-ahead(speed up to mm/s)and rotation(rotational speed above 100°/s)have been realized.With precisely controlling of the robot motion mode and speed,flexible swimming can be conveniently achieved.4.This attempt to bring acoustic devices manufactured by heterogeneous integration from wafer to micro robot propulsion applications would excite researchers’great interest in developing novel minimized robots for medical and biological fields.