Research On Micro-vibration Suppression Platform Based On Piezoelectric Array Intelligent Structure

With the rapid development of high and new technologies such as microelectronics manufacturing industry,aerospace technology,optical communication technology,ultraprecision processing technology,biomedical technology,semiconductor chip manufacturing,etc.,there is an urgent need for high-precision and high-stability precision mechanical systems,and the problem of micro-vibration control has become one of the important bottleneck technologies that restrict the accuracy and stability of the system.It is difficult to effectively control the micro-vibration with micro-amplitude,wide frequency and multi-degree of freedom by existing vibration control methods.In this paper,an integrated design method of intelligent structure based on piezoelectric array layout was proposed,and a micro-vibration suppression platform(MVSP)based on piezoelectric array intelligent structure was designed to achieve the effective control of micro-vibration.Firstly,the current research status and development trends of related technologies at home and abroad were analyzed and summarized from three aspects: micro-vibration suppression method,piezoelectric intelligent structure,and vibration isolation platform.Then,the piezoelectric stack was introduced from the aspects of its mechanical properties,electrical properties,output characteristics and usage methods,which laid the foundation for the design of the active-passive integrated actuator based on piezoelectric arrays.Secondly,several structural schemes of the MVSP were proposed,and they were compared and analyzed.The 6-PUU MVSP scheme was determined.After parameterized design,the structural design was carried out according to the determined parameters.Considering the characteristics of the micro-amplitude of micro-vibration and the processing and assembly errors of the mechanical structure,the active-passive integrated actuator adopted multiple piezoelectric stacks to replace the original single piezoelectric stack,and the multiple piezoelectric stacks were distributed in a circle.Based on the vibration isolation output displacement,the displacement of each piezoelectric stack was compensated,so as to achieve the effect of compensating processing and assembly errors.Thirdly,the kinetic energy and potential energy of each component of the MVSP were analyzed,and then the dynamic model of the MVSP was created by Lagrange equation,and the simulation analysis was carried out.The simulation results showed that the changing trends of the driving forces of the guiding components obtained by MATLAB and ADAMS software simulation were consistent.Although there was a certain error in the numerical value,the maximum relative error was 1.5%,which meeted the requirements for use.Finally,the MVSP based on the piezoelectric array intelligent structure was processed.According to the experimental scheme,the production and assembly of mechanical system prototype were completed.The control system with the STM32single-chip microcomputer as the core was developed,and the vibration isolation performance test based on the PID control algorithm was carried out.The experimental results showed that the MVSP had good vibration isolation performance,the vibration isolation frequency band was above 5 Hz,and the attenuation of micro-vibration signals with an amplitude of 2μm can reach 18% to 64%.The experimental results further illustrated the advantages of using the active-passive integrated vibration isolation method,which can increase the redundancy of the system.When one of the active or passive vibration isolation systems failed,the other vibration isolation system can continue to operate,which improved the reliability of the MVSP.