Research On Near-infrared Electro-tunable Optical Transmission Based On Graphene/Vanadium Dioxide Film

Due to its relatively low phase transition temperature（68℃）,the huge reversible changes in electrical and optical properties before and after the phase transition,and the hysteresis characteristics during the phase transition,vanadium dioxide has broad application prospects in many fields.However,in practical applications,it still faces key issues such as nano-scale pattern preparation,high modulation power consumption and slow modulation speed.This paper has carried out systematic research on these key issues,and the main research contents are as follows:（1）A high-quality VO₂ film was prepared.The VO₂ film was prepared based on the RF magnetron sputtering method and post-annealing technology.The characterization results showed that the VO₂ film prepared by sputtering deposition using VO₂ target and annealing at 500℃ for 60min in an argon atmosphere has good quality,and the resistance value change range before and after the phase change reaches 3 orders of magnitude.（2）The self-Joule heating-induced phase transition of nano VO₂ film is studied.A nano-scale VO₂ film was prepared in combination with photolithography and subjected to a bias-induced phase change test.The results show that VO₂ can cause a phase change from Joule heating under a bias voltage,but the phase change has higher requirements for the compactness of the VO₂ film.（3）The Joule heating characteristics of electrically biased graphene nanostrips are studied.Studies have shown that due to its good electrical and thermal conductivity characteristics,graphene nanostrips can be heated by Joule at a lower voltage to produce higher temperatures,and the temperature is related to the aspect ratio of graphene nanostrips,and has a faster temperature-time response speed.（4）The near-infrared electro-tunable optical transmission phenomenon of graphene/vanadium dioxide was studied.The VO₂/Graphene composite film structure was prepared,and the test results showed that the electrically biased graphene nanostrips can control the phase transition of the composite film.The optical transmittance of the composite film in the near-infrared band is increased by about 15%,the bias voltage is lowered by more than 20V,and the phase transition temperature is lowered by about 5℃.