Research And Improvement Of Quartz Glass Lumping Equipment Based On Vertical CVD Synthesis Process

Quartz glass is widely used in space technology,atomic energy industry,semiconductor and optical instruments due to its low coefficient of linear expansion,strong resistance to pressure,high temperature resistance and good optical properties.With the development of science and technology,the demand for large-size quartz glass is increasing,however,most domestic quartz glass manufacturers are currently limited by production equipment to produce quartz glass blanks(quartz glass lump)with a diameter of about 600 mm,which cannot meet the demand for quartz glass applications in the development of science and technology.In this paper,based on the actual demand for producing large-size quartz glass lump(1000mm in diameter and 1500 mm in height),we firstly simulate and analyze the existin g vertical cantilever lumping machine in the factory,and verify the accuracy of the simulation results with experiments;then design a vertical frame lumping machine that can be used to produce large-size quartz glass lump;finally,we simulate and analyze the designed vertical frame lumping machine to verify its feasibility,which provides a reference for the development of a vertical frame lumping machine that can produce large-size quartz glass lumps.The research of this paper is as follows:Based on the working principle of the existing vertical cantilever lumping machine,the static and thermodynamic analyses of the vertical cantilever lumping machine under different stresses were carried out,and the effect of the deformation of the vertical cantilever lumping machine on the verticality of the deposited foundation bar was obtained based on the simulation results.The analysis results show that the self-weight of the large-size quartz glass lump will lead to the large deformation of the existing vertical cantilever lump making machine,which cannot meet the process requirements of chemical vapor deposition production of quartz glass lump.The existing vertical cantilever lumping machine was subjected to temperature measurement and stress test to verify the reliability of the static and thermodynamic simulation methods and results of the cantilever lumping machine.Because the cantilever lumping machine cannot meet the requirements of the production process due to the large weight of large-size quartz glass lumps,this paper designs a vertical frame lumping machine which can be used to produce large-size quartz glass lumps,mainly including: lifting device,rotating device and swinging device.The static analysis of the designed vertical frame lumping mach ine was carried out,and the influence of the deformation of the lumping machine on the verticality of the deposition base bar under different load conditions was obtained.Thermodynamic analysis of the vertical frame lumping machine was carried out to der ive the effect of radiant heat at the furnace mouth on the deformation of the vertical frame lumping machine under different conditions.