Temperature Field Of Quartz Glass Furnace Research And Improvement Design

High purity quartz glass is a single component silica special industrial glass,its coefficient of linear expansion is extremely small,has very good thermal shock resistance,heat resistance and spectral projection properties,is widely used in spacecraft,wind tunnel windows,lasers,semiconductors and spectrometers and other high-tech fields.At present,quartz glass blanks(quartz glass steels)are mostly melted by chemical vapor deposition(CVD).The temperature distribution in the furnace during the melting process of quartz glass steels directly affects the structural homogeneity,stress size and stress distribution of quartz glass steels.To improve the quality of quartz glass steels and to produce high purity,high performance and high precision quartz glass products,a systematic and indepth study of the temperature distribution in the quartz glass steels furnace is required.In this paper,a theoretical and simulated analysis of the temperature distribution in the existing quartz glass steelyard furnace was carried out to determine the distribution of the flow and temperature fields in the furnace,and then the results were verified using temperature measurement experiments.The final structural design and temperature field simulation of the large diameter quartz glass melting furnace is based on the current demand to produce large quartz glass steels(over 1000 mm diameter).The details of this paper are as follows:Firstly,a theoretical analysis of the internal thermal process and the formation of the temperature field in the existing vertical quartz glass steelyard furnace in the plant was carried out to clarify the formation process of the quartz glass steelyard in the chemical vapor deposition process,the working principle of the burner and the theory of heat transfer in the furnace,laying a theoretical foundation for the analysis of the flow field and the associated temperature field in the furnace.Secondly,numerical simulations of the temperature field in the existing vertical quartz glass steelyard furnace were carried out using finite element software to derive the distribution of the heat flow field,temperature field and glass steelyard temperature in the furnace,and to analyze the influence of the air intake and the shape of the deposition surface on the quality of the quartz glass steelyard during the deposition process.In addition,the temperature measurement experiments were carried out in the existing vertical CVD quartz glass steelyard furnace to verify the accuracy of the simulation of the temperature field in the steelyard furnace and to provide a basis for the feasibility of the numerical simulation of the air flow field and temperature field in the furnace.Finally,the design of a large diameter quartz glass steelyard furnace was carried out,and the numerical simulation of the temperature field of the designed furnace was carried out to analyze the influence of furnace shape,deposition body speed,the degree of opening at the bottom of the furnace chamber,the position of the exhaust port and the number of material gas ports on the temperature field inside the furnace,which provides a reference basis for the development of large diameter quartz glass melting furnace equipment in the factory.