Analysis And Research Of Energy Containing Composite Film Transducer

The transducer is the core component of MEMS initiating explosive device,which is critical to the safety and reliability of MEMS initiating explosive device.The thin film transducer is a transducer whose surface is covered with an energetic composite film.It has better ignition performance than the conventional transducer.It has been widely studied in the field of modern initiating explosive devices.Based on the development of initiating explosive devices in recent years and the research achievements of scholars,this paper focuses on the design and preparation of thin film transducer,as well as the important factors affecting the ignition performance.In this paper,Al/CuO energetic composite films are integrated with semiconductor transducer by magnetron sputtering technology to prepare Al/CuO energetic composite film transducer,and Al/CuO energetic composite films are prepared by magnetron sputtering method.The physical and chemical properties of the films have passed the characterization and detection.The preparation method can realize the preparation of Al/CuO energetic composite film transducer,and the safety performance of Al/CuO energetic composite film transducer meets the national safety standards.The ignition experiment of Al/CuO energetic composite film transducer is numerically simulated by using the electrothermal simulation function of the simulation software COMSOL.The influence of different voltages and capacitors on the ignition process of the film transducer and the role of the film in the ignition process are mainly studied.It is found that the ignition process of the thin film transducer is very fast at high voltage,and the effect of the thin film is large,but the ignition effect is not ideal at low voltage,and the effect of the thin film is small.After data analysis,it is found that the heat conduction between the semiconductor bridge and the substrate is the main factor that leads to the unsatisfactory ignition effect of the thin film transducer at low voltage.Aiming at the ignition effect of Al/CuO energetic composite film transducer under different electric energy,a miniaturized PCB circuit connection is designed,an experimental platform is built for research,and the experimental platform is tested.The experiment shows that the experimental platform can meet the requirements of the ignition experiment.Three ignition experiments of Al/CuO energetic composite film transducer and semiconductor transducer with different capacitance or voltage and DC constant voltage are compared and analyzed.The experiment shows that Al/CuO energetic composite film can better improve the ignition effect of the transducer at 25 V or higher voltage.When the condition is 15 V or lower,the ignition effect of Al/CuO energetic composite film on the transducer decreases,and the increase of capacitance can slightly improve the effect.When the ignition voltage is too small,such as 5V,the semiconductor bridge of the transducer will not explode within 9s,which is similar to the ignition effect of the transducer under low voltage in the simulation experiment.It shows that the heat conduction process of the transducer has an important influence on the ignition performance of the transducer under low voltage.