| The application and further development of micro nano technology in recent years has been dependent on the high-precision micro nano positioning technology.The currently used micro nano positioning technology has problems such as high requirements for the detection environment and complex detection process that cannot be measured online,so new micro nano positioning technology needs to be developed.Surface Plasmon Resonance(SPR)is an optical phenomenon which is sensitive to some characteristic information in the structure,and the resolution of the optical sensor based on it can break the diffraction limit,and the detection speed is fast enough for online measurement.The main work of this paper is as follows:(1)The excitation conditions of the SPR phenomenon are summarized by Maxwell’s set of equations and the propagation equations of electromagnetic waves,and a four-layer Kretschmann prism structure for micro nano position detection is designed according to the theory and method of SPR detection,and the simulation experiments of the structure are carried out using finite element simulation methods,focusing on the effects of different metal film materials and different detection media on the micro nano position The effect of different metal film materials and different detection media on the detection performance of the micro nano position.(2)A prismatic SPR sensor for micro nano position measurement was designed and fabricated,and the performance of the SPR sensor with different thicknesses of gold films was verified by using a mechanical turntable structure with angle modulation.The SPR sensor with the best performance was selected for the micro nano position measurement experiment,and a wide-angle incidence excitation and CCD reception were used to realize the online measurement of the SPR sensor with angle modulation method,and the measurement results were obtained using curve fitting calculations,and the experimental results were compared with the simulation results to prove the feasibility of the sensor.(3)A micro nano positioning system based on the Kretschmann structure SPR sensor was built,and a software control program was written for the system,which can realize two positioning methods: step positioning and step positioning.The accuracy and characteristics of the two positioning methods are investigated experimentally,and the error sources of the positioning technique are analyzed to show the direction for further improvement.The results show that this paper proposes a micro nano positioning technique based on the Kretschmann structure SPR sensor,which can achieve micro nano positioning in the range of 250-1450 nm,with a positioning accuracy of 20 nm for the step positioning method and 10 nm for the step positioning method.Compared with the existing micro nano positioning detection methods,the positioning technique designed in this paper has a simple measurement method and high positioning accuracy,which can realize online micro nano positioning. |
