| Silicon solar cells are an important part of the photovoltaic field.Due to their advantages of long life,reliable performance and low price,silicon solar cells account for an increasing proportion of the photovoltaic market in recent years.More and more scientific researchers have begun to study the performance of silicon solar cells,aiming to effectively improve the performance of silicon solar cells,and the research in this paper is also to achieve this goal.In this paper,we prepared different types of TiO2-organic-inorganic hybrid thin film microlens arrays by UV nanoimprint technology and applied them to silicon solar cell devices,so that the surface of silicon solar cells has the texture of microlens arrays structure to achieve the purpose of improving device performance.The specific research contents are as follows:Organic-inorganic hybrid films were prepared by sol-gel technology and spin coating.The effects of the speed of the spinner,the curing time of UV light,and the heating temperature on the light transmission properties of the film were studied.The results showed that when the speed of the spinner was set to 2000 rpm,the UV curing was performed for 15 min,and the film was heated at100 ~oC for 1 h.The transmittance of the prepared hybrid films reaches about 90%in the wavelength range of 400-800 nm.The roughness of the prepared hybrid films was studied under the above conditions,and the results showed that the surface of the films was relatively smooth.The elemental composition of the hybrid films was investigated by X-ray electron spectroscopy.Circular microlens arrays,hexagonal microlens arrays,and square microlens array templates were prepared by photoresist thermal reflow method,and microlens array structures were obtained on the surface of hybrid films by UV nanoimprinting technology.The morphology of the hybrid thin-film microlens array was examined by inverted optical microscope and scanning electron microscope.The results showed that the microlens array was complete in structure and uniform in size.The size of the microlens array is analyzed by a profiler,and the result is that the size of the surface is basically in line with the expected design.The scattering characterization of the microlens array was carried out by a self-made laser irradiation system,and the results showed that the circular microlens array had better scattering effect on light.Finally,the analysis of the optical focusing and optical imaging performance of the hybrid thin-film microlens array is completed by the inverted optical imaging system.The results show that the imaging performance of the three microlens arrays is good.The polystyrene(ps)microsphere emulsion was prepared by soap-free emulsion polymerization,and the ps crystal film was prepared by self-assembly method.The size and uniformity of the ps microspheres were analyzed by transmission electron microscopy and particle diameter distribution analyzer,and the results showed that the ps microspheres had a uniform texture and no adhesion between the spheres.The ps crystal thin films were prepared on ethylene terephthalate(PET)substrates mainly by spin coating.In this process,the rotational speed of the glue dispenser and the processing power of the plasma cleaning machine were explored.The results show that the single-layer compact ps crystal thin film can be prepared by spin coating method,setting the speed of the spinner at 1900 rpm and the processing power of the plasma cleaning machine at 75 w.The microlens array template was replicated by PDMS,and the microlens array texture structure was successfully constructed on the surface of the silicon solar cell,and the cell performance was analyzed using the solar cell workstation.The results show that the power conversion efficiency of silicon solar cells can reach a maximum of 16.94%by using the microlens array,while the power conversion efficiency of bare silicon solar cells is 15.17%,and the conversion efficiency is relatively improved by 11.67%. |