Study On Microstructure Control And Tribological Properties Of TiSiN/TaVN Nano-multilayer Films

In high-speed,dry and other green cutting processes,problems such as large load(> 1GPa),large work hardening tendency,high temperature in the cutting area(>1000°C),difficulty in heat dissipation,and severe tool wear seriously restrict its processing efficiency and machining efficiency.quality.The coating technology provides an effective solution for improving tool hardness,wear resistance and processing efficiency.The coating has been developed from binary and ternary to nano-multi-component composite coating or nano-multi-layer coating.In this paper,nano-multilayer films with high hardness and good wear resistance are prepared by combining high hardness materials and self-lubricating materials,which provides a theoretical basis for the coating of high-speed dry cutting tools.In this paper,five kinds of V-content Ta VN composite films,five kinds of V-content TiSiN/TaVN nano-multilayer films,and five kinds of modulation periods of TiSiN/TaVN nano-multilayer films were prepared by magnetron sputtering,and then heat-treated.The crystal structure and various morphologies of the films were characterized by X-ray diffractometer,scanning electron microscope,laser confocal microscope,etc.The properties of the thin films were investigated by using a scratch tester,a nano-indenter,a comprehensive surface performance tester,and a vacuum resistance furnace.The main research contents are as follows:(1)The five kinds of V content Ta VN composite films all showed preferential orientation on the(111)crystal plane of Ta VN.The crystal plane diffraction angle increases gradually with the increase of V content;when the V content is 15 at.%,the film has the best crystalline state and the highest hardness;when the V content is20 at.%,the film adhesion reaches the maximum;when the V content is 30 at.%,the tribological performance is the best.(2)The five V-content TiSiN/TaVN nano-multilayer films all show preferential orientations on the(111)and(200)crystal planes.With the increase of V content,the diffraction angles of(111)crystal plane and(200)crystal plane increase;when the V content is 15 at.%,the crystalline state of the film is the best,and the mechanical properties and tribological properties are the best.(3)The five kinds of modulation period TiSiN/TaVN nano-multilayer films all show preferential orientations on the(111)and(200)crystal planes.When the modulation period is 8 nm,the crystalline state of the film is the best,and the mechanical properties and tribological properties are the best.(4)TiSiN/TaVN nano-multilayer films with a V content of 15 at.% and a modulation period of 8 nm undergo different degrees of oxidation after heat treatment at different temperatures.When the heat treatment temperature is 200 ° C,the adhesion of the film increases slightly,but the hardness does not decrease significantly.