Development And Engineering Application Of MEMS Array Displacement Meter

Deep displacement monitoring technology is an important part of landslide safety monitoring.It can provide the most intuitive displacement information inside the landslide body,and can also accurately find out the specific depth and direction of displacement.It is an important monitoring method in the early stage of landslide occurrence.For a long time,the deep displacement measuring device that can measure the internal deformation of rock and soil in real time has been monopolized by foreign countries.In recent years,the deep displacement monitoring device developed by many domestic scholars and companies often stays in the experimental stage or the accuracy is relatively low.At present,the inclinometer devices maturely used in various projects and slope scenarios are still mainly traditional inclinometers,which require regular monitoring by personnel.The instruments are seriously damaged and aged,and cannot achieve automatic,intelligent and high-precision remote monitoring.Therefore,the development and application of high precision automatic remote slope monitoring instrument is an urgent problem to be solved.Based on the design experience at home and abroad,this paper will carry out the independent research and development and application of MEMS array displacement meter monitoring system based on MEMS inertial sensing technology under the leadership of the research group tutor.The main contents are.(1)The hardware system of MEMS array displacement meter is integrated,including the design of array displacement meter monitoring system structure,the selection of main mechanical structure,the selection of core motherboard of displacement meter,the design of acquisition system and power supply system,the development of upper computer receiving end and the selection of remote transmission cloud platform.It provides hardware basis for later experiments and monitoring system engineering applications.(2)The error source of three-axis MEMS accelerometer is analyzed.Aiming at zero bias error,scale factor error and installation error,a three-axis MEMS accelerometer calibration method based on improved PSO algorithm is proposed.The results show that the calibration results of the improved algorithm are better than those of the unimproved PSO algorithm,and the accelerometer output is more stable.Aiming at the temperature error,the accelerometer temperature compensation based on RBF neural network model is carried out.The compensation results show that the output stability of the accelerometer is improved by2.79 times,and a good compensation effect is achieved.(3)The development of data processing software for monitoring system is carried out,from demand analysis,structural design,program writing to software testing.The functions of data comparison,graphics generation and data analysis of array displacement meter are realized,which improves the working efficiency of the whole monitoring system and the efficiency of later data processing.(4)The array displacement meter monitoring system is applied to the slope deformation monitoring of Liuwu Village in the upper reaches of Jinsha River,and the on-site installation and calibration work are carried out,which effectively reduces the installation error.Comparing the monitoring data of the array displacement meter with the monitoring data of the Baishuihe landslide in the Three Gorges Reservoir area,the reliability of the array displacement meter monitoring system is proved to meet the requirements of landslide deformation monitoring.