| Semiconductor laser has been the focus of laser research because of its small size,light weight,long working life and high efficiency.The silicon-photonic hybrid integrated external-cavity tunable semiconductor laser is a kind of external cavity tunable semiconductor laser.With its advantages of compact structure,small size,low cost and easy to realize packaging integration,it has been widely concerned by people.The～2μm band has the special advantages of large data capacity,low dispersion,low loss,high sensitivity and long detection range in communication,sensing detection and lidar.At present,the～2μm band related photoelectric devices and transmission fibers have been broken through.The～2μm silicon-photonic hybrid external-cavity tunable semiconductor laser source will likely replace the 1550nm band with limited transmission capacity,bringing new hope for large-capacity data optical communication transmission.At the same time,there are many strong absorption lines of dangerous gases,pollution sources,and greenhouse gases in the～2μm band.Therefore,the～2μm silicon-photonic hybrid external-cavity integrated tunable semiconductor laser is an important applied light source in the field of gas detection.This thesis proposes a structure of a～2μm silicon-photonic hybrid external-cavity multi-rings feedback tunable semiconductor laser.The main research work is to simulate the mode properties,structural parameter effects,and design of tunable system resonance in a rectangular straight waveguide and multiple micro rings on a silicon-photonic chip in the wavelength range of 1.95-2.05μm;Completed the external cavity self focusing lens coupling design;The coupling system and testing system of a～2μm silicon photonic hybrid external-cavity multi rings feedback tunable semiconductor laser have been built.The paper,the application,basic structure and research status of tunable external-cavity semiconductor laser are introduced.Secondly,the linewidth theory,tuning range,wavelenght selectiong and the integration method of the silicon-photonic hybrid external-cavity tunable laser are studied.Then,the principle,structure design,fabrication methods and some outuput characteristics ofⅢ-Ⅴclass SOA light source chip are studied.Then,by optimizing the waveguide structure,mode transmission and structure parameters of the muti-microring resonator,the structure design and system optimization of the silicon-photonic exteral-cavity chip based on the microring structure are realized.Finally,a coupling system and a test system for a～2μm silicon-photonic hybrid external-cavity tunable semiconductor laser are built.The focus is on the systematic study of TE and TM propagation properties in rectangular straight waveguides by Lumerical MODE,FDTD and Interconnect software,and the design of TE00single-mode transmission dimension structure and Si based multi-ring resonator in～2μm（1978-2036nm）band.A～2μm silicon-photonic hybrid external-cavity tunable semiconductor laser integration method is designed and studied.Design and study the integration method of～2μm silicon-photonic hybrid external-cavity tunable semiconductor lasers,and for the first time to hybrid integrate～2μm Ga Sb based SOA with silicon-photonic external cavity chips based on multi-ring feedback using graded-index lens simulation.Build a coupling platform system,and complete the design and preparation of anti-reflection films near the～2μm wavelength at graded-index lens and SOA cavity surface. |
