Research On Precision Process Technology For Ultra-high Quality Magnesium Fluoride Disk Microcavity

Whispering gallery mode crystal microcavity has the characteristics of high quality factor,small mode volume and easy integration,and has important application prospects and research value in the fields of nonlinear optics,microwave photonics and coherent optical communication.In view of the difficult preparation of ultra-high-quality magnesium fluoride microdisk cavity,this paper mainly conducts research on the precision preparation technology of ultra-high-quality magnesium fluoride microdisk cavity.The main work results are as follows:In this thesis,a precision fabrication and processing platform for ultrahigh-quality magnesium fluoride microdisk cavity is developed.On the basis of the material selection and structural design of the optical crystal microdisk cavity,a precise polishing preparation process route suitable for the magnesium fluoride microdisk cavity is researched and designed,and the corresponding magnesium fluoride microdisk cavity precision preparation and processing platform is successfully developed around the process.The thesis overcomes the precision fabrication and processing technology of ultra-high-quality magnesium fluoride microdisk cavity.The ultra-high-quality magnesium fluoride microdisk cavity with a surface roughness of 0.366 nm is successfully fabricated,and the quality factor reached 1.4×109 at the wavelength of 1550 nm.