Research Of Design Credibility Of Mems Integrated Microwave Signal Detection System

Since Maxwell and Hertz’s great contributions to the study of electromagnetism in the 19 th century,electromagnetism,especially wireless communication,has grown rapidly.In recent years,5G technology with its unique advantages and trend of information fusion around the world,has become the focus of research.Therefore,the detection of microwave signal has become more and more important.With the rapid development of micro-electro-mechanical system(MEMS)technology,more and more MEMS technology has been applied in the field of communication.Because of its unique advantages,MEMS microwave sensor plays an important role in microwave signal measurement.Also,studying the design reliability of MEMS microwave sensor has become extremely important because of the high cost and long period of semiconductor technology,and the design of RF device is closely related to its working frequency.Based on the background above,this paper studies the credibility of the design of MEMS microwave signal integrated detection system.The main contents include:(1)An indirect heating microwave power sensor is simulated by COMSOL software,and a mathematical model based on two-dimensional Fourier heat transfer equation with internal heat source is proposed to describe the power sensor.Using credibility evaluation method based on error analysis and the COMSOL simulation results as the standard,the parameters of equivalent substrate thickness in mathematical modeling are evaluated and the optimal parameters are obtained.The power sensor is designed and fabricated,and the microwave and thermoelectric properties of the device are measured.The results show the excellent performance of the device and its thermoelectric performance is close to that obtained by COMSOL simulation and mathematical model;(2)A mathematical model is proposed to describe the back-thinning indirect-heating Microwave Power Sensor and three correction values are proposed to describe the parameters of the equivalent substrate thickness.Using the simulation results of COMSOL software as the standard,the mathematical model is evaluated based on error analysis,and the reasonable equivalent substrate thickness is selected;(3)According to the requirement of microwave signal integrated detection,a microwave signal integrated detection system based on silicon process is proposed.The system can be used to detect the power,frequency and phase of the signal at the same time.Through the design and optimization,the designed system meets the design requirements.The technological process and layout of the system are designed;(4)Aiming at the credibility of the design of the integrated microwave signal detection system,systems whose central frequency point is 1 GHz in X-band,C-band,S-band and Lband are designed,respectively.The results show that the microwave signal integrated detection system designed by the proposed topology meets the performance requirements.At the same time,comparing the key structural parameters in the design with the theoretical calculated values,the deviation between the two is small,both less than 16%.The combination of the above two points indicates that the credibility of the microwave signal integrated detection system is relatively high.The innovations of this paper are following:(1)A mathematical model of GaAs MEMS thermoelectric microwave power sensor based on two-dimensional Fourier heat transfer equation is proposed,and the parameters of the mathematical model are optimized using a credible comprehensive analysis method based on error analysis;(2)A design method for Si microwave signal integrated detection system is proposed,and the credibility of the design method is evaluated by comprehensively analyzing the structural parameters and performance indicators of the design.