Performance Degradation Analysis Of Micromachined Butterfly Gyroscopes Under Random Vibration Load

With the increasing application of MEMS gyroscopes in military and civilian fields,the application environment is more and more complex.As the core component of inertial navigation systems,the reliability of MEMS is of great significance to the safe and reliable operation of the equipment.The influence of vibration on the reliability of it cannot be ignored.Under the action of vibration environment stress,it can cause fatigue,fracture,metal lead fall off and other failure modes of MEMS gyroscope.In this paper,the EG136 A micromachined butterfly gyroscopes is taken as the research object to study the reliability of the gyroscopes in the vibration environment.The theoretical,simulation and experimental methods are used together to analyze the performance degradation of the it in random vibration environment,which provides a new method for the failure mechanism analysis of micromachined butterfly gyroscopes.The main work of this paper is summarized as follows:(1)The dynamic model of the micromachined butterfly gyroscope is studied,and the influence of random vibration on it is analyzed,which includes two aspects: one is to produce output error,and to deduce the generation mechanism of error caused by orthogonal coupling signal in random vibration environment;the second is to reduce its performance,and the performance of the performance degradation is analyzed.(2)The typical service environment analysis and random vibration simulation of the micromachined butterfly gyroscope are carried out,and its vibration load characteristics under three typical applications are analyzed,which provides the basis for the simulation and experimental research of the performance degradation of the it under the random vibration load.Aiming at the typical random vibration load,the domestic EG136 A micromachined butterfly gyroscope is taken as the research object.The vibration mode simulation analysis and vibration response simulation analysis are carried out,and the modal frequencies and vibration modes of each order are determined.And through the response spectrum analysis,it is found that the intersection of the inclined support beam and the trapezoidal beam is more prone to fracture failure under random vibration conditions.(3)The degradation of the performance of the micromachined butterfly gyroscope in the typical random vibration environment is studied,the vibration step stress test was carried out to determine the root mean square acceleration limit stress of it under the typical random vibration environment,and the performance degradation model of it in random vibration environment was established.Through the vibration test,when the vibration acceleration reaches 62.5g under the typical random vibration spectrum of jet aircraft,the micromachined butterfly gyroscope fails after 14 hours of operation,and the failure mechanism is that the intersection of the inclined support beam and the trapezoid beam breaks,which is consistent with the simulation results.According to the experimental data,the variation law of the zero-bias stability and resonance frequency of the micromachined butterfly gyroscope with the vibration magnitude is studied.Under the vibration spectrum condition,when the acceleration level does not exceed50 g,the zero-bias stability of it is linear with the vibration acceleration;the relationship between the resonance frequency and the vibration magnitude is not obvious.