Research On Optical Fiber Sensor Demodulation Method Based On Microring Filter On Silicon Photonics Chip

Sensing technology is one of the hotspots research in the world.The optical fiber sensing technology has developed rapidly in recent years due to its unique advantages such as high measurement accuracy,easy networking,and anti-electromagnetic interference.Optical fiber sensing is a sensing technology that establishes a relationship between the change of the parameter to be measured and the change of the optical parameter in the optical fiber.Through the demodulation of the sensor signal,it is a sensing technology that reverses the change of the physical quantity to be measured outside.Demodulation technology is the core in optical fiber sensing systems.And some application environments such as aerospace,robotics,and defense industries have put forward an urgent need for integrated and miniaturized optical fiber sensing demodulation systems.This work studies the demodulation scheme of an optical fiber sensor based on a silicon on insulating(SOI)substrate platform with a tunable micro-ring resonator filter.And the micro-ring filter has the characteristics of high scanning speed,small size,and low power consumption.Aimed at the fiber grating sensor,a wavelength scanning demodulation chip based on a tunable micro-ring resonator filter is designed.By optimizing the data processing algorithm,the dynamic demodulation of the 200 Hz vibration signal is initial achieved.For the interferometric optical fiber sensor,an interferometric vernier effect sensor demodulation chip based on a micro-ring filter is proposed.The vernier effect is generated by the superposition of the micro-ring resonance spectrum and the Segnac interference spectrum,which achieves an 8 times sensitivity enhancement compared with the Segnac interferometer sensor.This dissertation proposes the research of on-chip micro-ring filters to realize the demodulation of fiber grating and fiber interferometric sensors,which lays the foundation on integrated,high-precision and low-power on-chip demodulation systems.