Design,Manufacture And Test Of Vibrating Plate Of Piezoelectric Inkjet Print Head

In inkjet printing technology,piezoelectric inkjet printing technology not only plays a huge role in the graphic printing industry with its good liquid compatibility,higher working frequency and resolution,longer working life and lower process cost.It is also used in the fields of electronics,biochemical and rapid prototyping.There is a huge demand for piezoelectric inkjet printing equipment in my country,but the research on related technologies is immature,and the core component of printing equipment(print head)has always been dependent on imports.This article independently developed a printing head drive component(vibration plate),And verify its feasibility.The main contents include:(1)Introduce the pressure transmission process in piezoelectric inkjet.Design the structure of the vibrating plate,and select each film material according to the different functions and process requirements of each layer structure.The specific substrate is a single crystal silicon wafer,the lower electrode is a titanium platinum composite metal,the piezoelectric layer is a lead zirconate titanate,the upper electrode is a chromium gold copper composite metal,and the protective layer is a polyimide.Introduce the micro-nano manufacturing process involved in the preparation process.(2)Use finite element numerical analysis to simulate and optimize the main parameters of the vibrating plate,and select the appropriate size based on the actual process conditions and experience.The determined parameters are: the length and width of the vibrating plate are2800?m and 250?m respectively;the thickness of the elastic layer is 200nm;the width and thickness of the piezoelectric layer are 200?m and 1.4?m respectively;the copper thickness in the upper electrode is 0.5?m;the thickness of the protective layer is 1?m.Compare the impact of different driving signals on vibration,choose a single trapezoidal wave as the driving signal and optimize it.(3)Carry out specific process manufacturing to the vibrating plate,and explain the process flow and parameters of the preparation and patterning of each layer structure of the vibrating plate.In view of the presence of residual glue when removing the negative photoresist,the side etching phenomenon of the metal film in the wet etching process is used for removal,which effectively reduces the amount of residual glue.(4)Carry out packaging and laser Doppler test on the vibrating plate to verify that the vibrating plate can provide sufficient and effective power for the inkjet print head;perform the inkjet test on the print head using the vibrating plate designed in this paper as the driving element to verify The feasibility of the vibrating plate in practical work is discussed.