Design Of MEMS Deformable Mirror And Research On Driving Control Method

Deformable mirror(DM)is a core device that uses structural deformation to achieve beam deflection.The traditional beam deflection system controls the beam deflection through a mechanical method and requires the installation of additional mechanical systems.To meet the requirements of an optical network system such as stable performance,fast response speed,low cost,simple process and easy precise control,this paper studies a hysteresis and nonlinearity based on ionic metal composite material(IPMC),and proposes a This kind of beam deflection deformable mirror component based on the IPMC four-beam structure overcomes the key technical problems of current beam deflection devices,such as large volume,high power consumption,and slow response speed.The main work of this paper is as follows:First,the deformation mirror of the IPMC four-beam structure is analyzed theoretically,the relationship between the deflection,stress and the four-beam structure parameters is determined,and the IPMC four-beam structure parameters are simulated and optimized.Secondly,by studying the hysteresis and nonlinearity of IPMC materials,a discretized Preisach model is established.Finally,based on the Preisach inverse model,three schemes were established:hysteresis inverse compensation control,hysteresis inverse compensation control and self-tuning PID control combined compound control,hysteresis inverse compensation control and auto disturbance rejection control combined compound control schemes.The simulation results show that the composite control scheme based on the combination of hysteresis inverse compensation and active disturbance rejection control has better performance,with the maximum absolute error less than 0.2?m and the variance of0.058.The expected displacement and the actual displacement present a linear change law.The linear equation y=1.0023x and the correlation coefficient R~2=0.9993 can meet the precise tracking control requirements of the IPMC four-beam structure deformable mirror in the beam deflection technology.All these provide a theoretical basis for the design and development of micro-components for micro-volume,fast response,high-precision tracking and control of beam deflection in laser communication systems.