| With the rapid development of the semiconductor industry,the demand for IC substrates as the core material of chip packaging is also increasing.As an important part of the semiconductor manufacturing field,semiconductor testing has an extremely significant impact on the quality of the chip.The automatic transmission system is also the main component of the substrate testing system.Its function is to realize the rapid,accurate and efficient substrate the transmission between them directly reflects the degree of automation of the test system.This article firstly analyzed the movement of substrate transmission,designed a new structure of automatic transmission system and modeled each part structure of the system,finally assembled complete structure.On this basis,this article planed the obstacle avoidance trajectory of the transmission robot,and optimized the structure of the end effector,which would improve the stability and efficiency of the substrate transmission process.The specific research content and conclusions are as follows:(1)According to the current situation that common automatic transmission systems at china and other usually rely on transmission robots to transmit workpieces,this article designed a more compact,more efficient and more accurate structure that include double-loader and double-Straightening mechanism,which allocated the X,Y,Z,and C-direction movements that complete the substrate transfer to the three major parts of the automatic transmission system which include loader,transfer and workbench.(2)According to the functions that complete to test IC substrate,this paper has conducted functional design and structural design for the three major parts and movement mechanism,and selected the standard components.Finally,entire automatic transmission system is assembled.(3)According to the actual transmission situation of the substrate by robot,this paper posed static obstacle avoidance trajectory planning of transmission robot,and designed two obstacle avoidance methods which are the based on the intermediate point trajectory and the returning to the origin.And the paper simulated the motion of the two obstacle avoidance methods by Matlab robot toolbox,which would obtain the curve diagrams of the displacement,velocity and acceleration of each joint of the robot during its motion.The results show that the two methods can achieve the purpose of obstacle avoidance,but the method of based on the intermediate point trajectory could make the robot movement more stable and better complete the work of transferring the IC substrate which the change of each joint of robot was small that maximum change is 1.878 rad during the robot movement.The value of velocity and acceleration was no sudden change,which the maximum speed is 1.761rad/s,and the maximum acceleration is2.71rad/s~2.It is of great significance to the stability of the IC substrate transmission process.(4)The end effector had an important impact on the stable transmission of IC substrate.In order to design a structure with light weight,small size,small flexibility and reliable structure to improve the speed and stability of the substrate transmission on each modules.The paper firstly conducted the topologically optimize for the end effector to design a initial structure by finite element software,and utilized shape optimization for the initial structure by ACE technology and mathematical programming,finally obtained new end effector that meet the requirement of strength and rigidity.The paper compared the maximum strain,mass,and first-order mode of the end effector before and after the optimization,the results show that the optimized structure can reduce the weight by 12.65%,achieving the goal of lightweight,first-order mode frequency is increased by 46.75%while meeting the design requirements. |
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