Research On Langasite Surface Acoustic Wave Temperature-acceleration Sensing Technology For High Temperature Environment

Aircraft are often accompanied by harsh environments such as high temperature,high rotation,and high pressure during the flight,especially on the surface of hypersonic aircraft,aero engines,and gas turbines,and other key parts.The local temperature even exceeds several thousand degrees.Therefore,temperature and vibration in harsh environments The in-situ real-time acquisition of other parameters is of great significance for aircraft material selection,structural design,and protective measures.In response to the requirements for real-time field testing of dual parameters of temperature and vibration in harsh environments such as aerospace vehicles and engines,such as high temperature and high speed,this paper proposes two surface acoustic wave temperature-acceleration sensors.The substrates are all langasite.One can measure acceleration in a single-axis direction,and the other can measure acceleration in a three-axis direction.Both sensors can realize acceleration temperature compensation,and the acceleration and temperature are completely decoupled.And can realize the acceleration temperature measurement under 450 ? high temperature.In acceleration measurement,especially when acceleration measurement is performed under high-temperature conditions,the measurement error caused by temperature drift is not negligible.This article not only considers the influence of temperature on frequency response during acceleration measurement but also considers the influence of temperature on acceleration sensitivity,It is of practical significance for the current temperature drift problem under acceleration measurement at high temperature.This paper uses COMSOL and MATLAB simulation software to optimize the design of the sensor's dimensions and the tangential direction of the sensor.The metal structure of the sensor is determined by establishing the COM model of the sensor,and the sensor is made and tested to verify the theoretical feasibility.The acceleration sensitivity of the manufactured sensor can be reached,and the temperature sensitivity can be reached.Because of the more commonly used sensors with quartz and lithium niobate substrates,the potassium silicate lanthanum substrate has a high melting point,and the temperature is lower than the melting point without phase change.The temperature measured by the sensor in this paper can be as high as 450?,which can realize the measurement of temperature acceleration speed at a higher temperature.