Design And Sensitivity Characterization Of Flexible Temperature Sensor

Temperature,as a basic physical parameter,changes in time and space,and can be used to monitor physiological activities,especially the heat transfer between biological tissues and the environment.Accurate and continuous detection of local temperature changes in biological tissues,regardless of largescale deformation,is essential for understanding the thermal principles of dynamic equilibrium.Wearable flexible temperature detection requires that the sensor has sufficient sensitivity and accuracy,can be directly attached to the surface of different postures and moving objects,and perform continuous measurement within the smallest user perception range.Flexible temperature sensor provides possibility for the establishment of intelligent medical system.In this paper,a flexible temperature sensor is designed and manufactured to realize the detection of human body temperature,and the structure design,finite element simulation,processing technology and sensitive performance of the sensor are systematically analyzed.The main research contents are as follows:The structure of the flexible temperature sensor is designed to improve the sensor's anti-strain interference ability,and the finite element analysis method is used to perform finite element simulation analysis on the temperature measurement process of the flexible temperature sensor through Ansys Workbench 19.0,and the heat conduction of the flexible temperature sensor is explained.In this way,the thermal conduction model of the sensor is established,the thermo-solid coupling analysis is carried out on the sensor,and it is verified that the designed sensor has good temperature distribution characteristics when working,and the size and distribution of the stress on the sensor are analyzed.Research the manufacturing process technology of flexible temperature sensor,fabricate metal electrodes through magnetron sputtering and photolithography peeling process,use mechanical micromachining technology to adjust the resistance of the sensor,and finally carry out the sandwich structure package of the flexible temperature sensor,and the prepared The metal electrodes on the surface of the flexible temperature sensor were characterized and analyzed.It is calibrated through the built-up flexible temperature sensor experiment platform,and the temperature measurement range,resolution,response time and stability of the sensor are measured.The experimental analysis is carried out on the anti-strain interference ability of the proposed flexible temperature sensor.The experimental results show that the proposed flexible temperature sensor has high anti-strain interference ability.The prepared flexible temperature sensor is used to measure the human body surface temperature and breathing temperature.Finally,the temperature measurement accuracy of the proposed flexible temperature sensor is compared with the standard infrared body temperature detection equipment.The results show that the proposed flexible temperature sensor has a wide range of application prospects in human body temperature measurement.