| Multi-arc ion plating is a kind of physical vapor deposition technology,which can prepare many types of special films such as diamond-like carbon,Ti N,Ti Al N and Ti Si Al N,and is widely used in cutting tools,aerospace,medical equipment and semiconductor industries.However,domestic high-end coating machines rely heavily on imports,especially the multi-arc ion coating machine,which has a sophisticated and complex structure and highly integrated operating system,which makes it more dependent on foreign countries.Therefore,the design and manufacture of multi-arc ion coating machines with independent intellectual property rights It is of great significance.The main work of this paper is to design the key components of the multi-arc ion coating machine with the help of the 3D modeling software Solidworks on the basis of the coating process and vacuum design requirements,and use the finite element analysis software ANSYS to optimize and verify the key components.With the help of ball mill,X-ray diffractometer and three-dimensional profiler,the experimental analysis of high-speed steel specimens prepared with different coating pitches was carried out,and combined with enterprise feedback,the optimized design of the converter frame and saw blade coating special fixture was completed.The main conclusions are as follows:(1)Complete the design and selection of the key components of the multi-arc ion coating machine with the help of three-dimensional modeling software,including the completion of the structural design of the vacuum chamber of the regular hexagonal coating machine,the selection of main materials,the design of wall thickness,and the selection of vacuum pumps.Model,heating system optimization design,vacuum time estimation,shaft sealing structure design and auxiliary equipment design,etc.(2)With the help of the finite element analysis software ANSYS,the vacuum cylinder of the coating machine is statically analyzed,and the influence of the edge fillet size on the equivalent stress and deformation of the structure is studied and analyzed,and the fillet radius of the structure is R=30mm.At this time,the minimum equivalent stress is 174.35 MPa,and the structural performance is the best at this time,which lays the foundation for the further design and optimization of the vacuum chamber.(3)The vacuum chamber of the multi-arc ion coating machine is composed of a vacuum cylinder,an upper cover and a lower cover.The vacuum chamber should meet the material selection allowable stress(205 MPa)and the requirements of the vacuum design manual(deformation less than 0.5mm)under high temperature and high pressure environments.Therefore,on the basis of optimizing the fillet of the vacuum cylinder,the Coupled analysis of temperature and thermal-mechanics,the distribution of temperature and stress and strain under natural cooling conditions are obtained,which provides directions for further structural optimization.The maximum temperature of the upper cover plate before optimization is318℃,the maximum equivalent stress is 359.3MPa,and the maximum deformation is 2.2mm.After installing the cooling water jacket and stiffeners,the maximum temperature is reduced to 29℃,the equivalent stress is reduced to 200.9MPa,and the deformation is reduced to0.29mm;the maximum temperature before the optimization of the lower cover plate is 398℃,and the maximum equivalent stress is 303.6 MPa,the maximum deformation is 0.57 mm.Since the lower cover plate needs to be connected to the support frame and bear the load of the converter frame,the lower cover plate is designed as a double-layer structure,and a thickened cooling water jacket is set in the two-layer structure to cool down and strengthen the structure.After optimization,The maximum temperature is reduced to 27 ℃,the maximum equivalent stress is reduced to 183.7MPa,and the maximum deformation is reduced to 0.13mm;the maximum temperature before the optimization of the vacuum cylinder is 399℃,the maximum equivalent stress is 1840 MPa,and the maximum deformation is 4.1mm.The vacuum cylinder has a large surface area and many openings,so it is designed as a double-layer structure with a thickened baffle with cooling water in the middle.After optimization,the maximum temperature drops to 28°C,the maximum equivalent stress reaches 171.7MPa,and the maximum deformation reaches 0.37 mm.In order to further verify the reliability of the structure,the assembled vacuum chamber was verified and analyzed,and the maximum local temperature was 42°C,the maximum deformation was 0.44 mm,and the maximum equivalent stress was 165 MPa.The equivalent stress and deformation met the requirements.This time,the vacuum chamber is firstly subjected to natural cooling analysis to obtain the temperature and stress and strain distribution,and then a more targeted optimization analysis is performed to obtain a cavity structure that meets the process and design requirements,which not only improves the optimization efficiency,but also greatly reduces The number of welds.(4)With the help of ANSYS software,the modal analysis of the multi-arc ion coating machine is carried out,and the first six natural frequencies and corresponding vibration shapes are obtained.It is found that the deformation at the reserved target interface is large,which can be improved by increasing the wall thickness or adding stiffeners..Through the analysis results,it is found that the natural frequency of the multi-arc ion coating machine is relatively high,and it will not resonate with the vacuum pump group and the transmission motor with a low vibration frequency.(5)Complete the design and manufacture of the gear drive converter frame and the special jig for coating of large circular saw blades.With the help of ball mill,X-ray diffractometer and three-dimensional profiler,the optimal coating spacing of the special jig for saw blade coating is optimized by experiment,and obtained The optimal distance between the upper and lower saw blades is 25 mm.At this time,the thickness of the Ti Al N film of the circular saw blade is 3.02μm,the surface roughness is 0.0243,and the preferred orientation of the crystal plane when the film is crystallized is the(111)interface.The saw blades produced by the improved large-scale circular saw blade coating special fixture have significantly improved wear resistance and service life. |
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