Design And Experimental Study Of Gas Diaphragm Pump Based On Piezoelectric Drive

Piezoelectric diaphragm pump conveying liquid high precision,easy to flow control,and the device structure is compact and easy to be suitable for miniaturized occasions,has a broad market prospect.The traditional piezoelectric diaphragm pump uses the combination of piezoelectric ceramics and film to make piezoelectric vibrators,and the installation method of peripheral clamping is used.However,this installation method limits the deformation of the piezoelectric oscillator,so that the piezoelectric diaphragm pump has only a small volume change of the pump chamber.The proposed resonance principle provides a solution for increasing the volume variation of piezoelectric diaphragm pump cavity.The resonant piezoelectric diaphragm pump amplifies the vibration displacement of the piezoelectric oscillator and drives the diaphragm vibration of the pump chamber,thus greatly increasing the output flow rate of the piezoelectric diaphragm pump.Based on the research needs of "Theoretical Design and Key Technology Research of Piezoelectric Driven Gas Flexible Actuator" supported by National Natural Science Foundation of China(51705031)and "Design Theory and Key Technology Research of Piezoelectric Driven Fluid Flexible Braille Point Demonstrator" supported by Natural Science Foundation of Jilin Province(20200201063JC),A new type of piezoelectric gas diaphragm pump,which uses piezoelectric twin-wafer circular piezoelectric vibrator as the driving source and uses resonance principle to drive metal film to change the volume of pump cavity and make the gas flow in one direction,is fabricated.The structure of piezoelectric gas diaphragm pump is briefly described,the use of piezoelectric material and substrate is determined,and the vibration mode and supporting mode of piezoelectric vibrator are analyzed.The mechanism of the motor conversion of piezoelectric vibrator is discussed and four kinds of piezoelectric equations are introduced.The force and deformation amplitude of the piezoelectric vibrator are calculated by the plate and shell theory.The piezoelectric gas diaphragm pump is divided into the cavity part and the driving part.The theoretical modeling of the piezoelectric gas diaphragm pump is carried out by using Matlab simulation software.The influences of the height of the cavity and the amplitude of the thickness of the umbel valve and the radius of the cavity on the air velocity and flow rate of the cavity are analyzed,which provides a theoretical basis for the design of the cavity.Using the theory of multiple degree of freedom system for piezoelectric diaphragm pump gas theory model is set up to calculate the resonant frequencies of a piezoelectric diaphragm pump gas compared the resonant and non-resonant system volume change,the theory of comparative theory of damping and a damping system has been analyzed the mass volume change and the selection of spring plate theory of system natural frequency and the influence of the volume change,summed up the blocks in the piezoelectric diaphragm pump gas production quality and the collocation of spring plate method For the design of the piezoelectric diaphragm pump gas laid a theoretical foundation.According to the theoretical analysis results,a prototype of the piezoelectric gas diaphragm pump was made,and the performance of the resonant pump was experimentally tested by the laser micrometer,flow meter and impedance analyzer.The influence of the cavity height on the cavity flow rate and the correctness of the calculation of the flow rate of the piezoelectric gas diaphragm pump by the multi-degree of free system were verified.It shows the excellent performance of piezoelectric gas diaphragm pump in conveying gas.