Optical Plane Ultra-precision Machining And Parameter Optimization

Optical planes are often used in optical systems and have an irreplaceable role in defense and high-precision inspection equipment.For the processing of optical planes,the currently more mature process is a combination of grinding and polishing.The main processing purpose of the grinding stage is to improve the dimensional accuracy and geometric accuracy of the workpiece.The main processing goal of the polishing stage is to remove the metamorphic layer after grinding and finally obtain the expected surface topography.This thesis mainly focuses on the problems of inaccurate removal prediction in the current ultra-precision machining of optical plane components,insufficient acquisition and utilization of parameters that affect processing quality,and low degree of automation during the machining process,and studies the grinding and polishing principles of optical planes.Based on this,the processing technology of the optical plane is discussed,and the general steps of the ultra-precision machining of the optical plane and the realization of the processing process are introduced with the plane processing of the alumina ceramic disc as an example.In this paper,experiments are performed on parameters that affect the quality of optical plane processing,such as the size of the abrasive,the movement of the workpiece,and the eccentricity of the workpiece relative to the grinding disc,and verify the impact of the above parameters on the quality of optical plane processing,and explore the application of parameter setting values.Range,and then in the processing practice,each parameter is optimized to improve the processing quality and processing efficiency of the optical planar element.Based on the grinding trajectory equation of optical plane machining and the actual machining situation,this paper proposes a method for obtaining relevant machining parameters by means of machine vision,and builds a model for predicting the removal of machining parts during grinding and polishing.The machine vision method is used as an input to obtain the relevant parameter values that have an impact on the processing quality during the processing,and the removal amount prediction model is used to output the removal and distribution of the workpiece processing amount in the current period.In the end of this dissertation,K9 optical glass is used as the processing material,and the plane of the rectangular strip mirror is selected for processing experiments.In the course of the experiment,the parameters affecting the machining quality are studied,simulated and optimized,and some existing experimental phenomena are explained.