Research On High-precision Focused Ion Beam Technology Based On Micro/Nano Detection And Automatic Compensation

Focus ion beam(FIB: focus ion beam),as one of the important technologies in the field of micro-nano processing,has the characteristics of sketching,rapid prototyping,and high processing accuracy.Usually used to make transmission electron microscope samples,repair circuit chips,and can manufacture various complex micro-nano devices.In the field of micro-nano manufacturing,this technology is widely used.The purpose of this paper is to expand the scope of the focused ion beam,improve the processing accuracy of the focused ion beam,and help to develop the focused ion beam equipment.The research results are generally applicable to the focused ion beam technology and its equipment,and can be applied to the preparation and processing of other micro-nano devices under special circumstancesIn this paper,based on the traditional focused ion beam,the plane and depth of the ion beam processing are experimentally designed.From the experiment,the influence of the ion beam processing position on the processing result is found.The width of the gravure ’is more balanced;the actual depth of the ion beam processing is very different from the set depth,but within a certain range,the actual depth can be predicted by univariate linear regression.We found deficiencies in the traditional focused ion beam processing experiment,so we added a machine vision system and an automatic compensation system to the traditional ion beam processing,improved it to automatically control the focused ion beam,and demonstrated its superiority after the upgrade through verification experiments Sex.In the machine vision system verification experiment,the larger the radius of the processed round hole,the smaller the field of view of the processing,the higher the recognition accuracy,and the highest accuracy of the fitted image is no different from the actual image.In the experiment of automatic compensation system,the processing size and position were compensated separately.The accuracy of automatic compensation often depends on the accuracy of machine vision,and can also reach the nanometer level.The success of the automatic compensation experiment is conducive to improving the high precision and full automation of the ion beam processing micro-nano structure.Finally,the focused ion beam was also applied to photonic crystal and micro / nano injection molding,and a two-dimensional photonic array and nano-scale injection molded parts were successfully prepared.Both the traditional focused ion beam technology and the automatically controlled focused ion beam technology have their use scope and conditions.It is very suitable to use the traditional focused ion beam in a small range,small processing,and low complexity.Only in a large range,high processing complexity,the use of automatic control focused ion beam processing,both have their own Advantages and usage scenarios.The combination of traditional technology and upgrade technology has played its own advantages.At the same time,it indicates that the realization of automatic controlled focused ion beam processing technology means that micro-nano factories,full automation of micro-nano processing has high feasibility,and it also lays a solid foundation for the generalization,industrialization,and intelligence of micro-nano processing in the future.The field of micro-nano processing and manufacturing is of great significance.