| Mode coupling based on nano-electromechanical systems has been a very popular research topic in recent years.The coupled resonator is of great significance to the research of applications such as precision measurement and fundamental science such as quantum information.According to the existing conditions and construction progress of the laboratory,this paper chooses the few-layer graphite mechanical resonator as the main research object to study the modal evolution and interaction of the mechanical resonator under the control of multiple fields such as light,electricity,and microwave.Specifically,the main content of this thesis is as follows:1.Brief introduction to the micro-nano processing equipments,principles and fabrication methods required for the preparation of the few-layer graphite resonator.2.Experimental studies on tympanic membrane few layer graphite mechanical resonator,including mode characterization.The mechanical mode of the resonator demonstrates lasing phenomenon as the pump intensity increases,and relative theoretic is deduced.3.Experimental studies on series few layer graphite mechanical resonator based on electron beam lithography,including mode characterization.The strong mechanical mode coupling is observed between neighbouring and spatially separated oscillators,and mode coupling strength is modulated by electric field.The nonlinear coupling and synchronization between neighbouring and spatially separated oscillators,and synchronizated strength is modulated by electric field.4.Experimental studies on series few layer graphite mechanical resonator based on Under-cut processing,including mode characterization.It is observed that the nonlinear response of the mechanical oscillator is modulated by the electrothermal effect.The thermal transport of the series resonator is observed,and the strong coupling of the localized modes of the resonator is modulated by the electrothermal effect.The main innovations of this thesis are:1.Experimental observation to the phonon lasing phenomenon in the material system based on graphite mechanical oscillator.2.Experimental observation to the synchronization in the strong coupling region of the mechanical mode and the modulation of the electric field on the synchronization.3.Experimental observation to the electrothermal effect modulation of the nonlinear response of the graphite resonator mechanical mode,and the influence of the electrothermal effect on the strong coupling of the local mechanical mode of the resonator. |