Optical interferometry is a high-precision,high-efficiency,non-contact spherical topography detection method.It is an ideal surface topography detection method.The single measurement of the interferometry method is a spherical crown area with a fixed aperture,and multiple measurements make the measurement area cover the full caliber.The sub-aperture stitching technology is an effective method to display the full caliber of the spherical surface.In order to obtain the full surface information of microspheres,this topic studies the stitching paths and matching errors in the subaperture stitching technology of microsphere surface interferometry.The main research contents of the paper are as follows:First,the principle of the microsphere surface interferometry system is studied,including the principle of Linnik-type short coherent polarization interference and the composition of the detection device.Then,the sub-aperture stitching technology on the surface of microspheres is studied,including phase shift interferometry neutron aperture phase calculation method,subaperture stitching algorithm and sub-aperture stitching steps,which are applied to the detection of sub-aperture stitching in microspheres.Next,a spherical sub-aperture stitching method based on planar registration is designed,which mainly performs sub-aperture stitching on the plane.The splicing of the sub-aperture group of the plane to the spherical surface is first spliced inband and then spliced between the bands.The defect detection device was used to actually detect the microsphere surface with a radius of 1 mm,and the spherical sub-aperture stitching technology based on plane registration was used to obtain the full surface shape of the microsphere.The defect analysis technology was used to compare the scatter information of the defect with the standard curve of the target defect to analyze the roughness of the microsphere surface.Finally,the error analysis is performed for each step in the actual measurement and splicing process.The experiment requires that the misalignment of each ring belt on the spherical surface is not more than 0.01 mm.The results show that the maximum error in longitude is 0.6 degrees,and the maximum error in latitude is 0.4 degrees.After conversion,less than 0.01 mm meets the requirements.The results show that the method used in this paper is suitable for sub-aperture stitching of microsphere surfaces,and the developed instrument has been delivered to the Institute of Engineering Physics. |