Development Of X-ray Fluorescence Microarea Scanning Imaging System

X-ray fluorescence spectrometer has the advantages of rapid analysis,easy to carry,high accuracy,non-destructive and environmental protection,and has been playing an increasingly prominent role in practical application.However,existing X-ray fluorescence spectrometer can only elements of the sample do qualitative and quantitative analysis,to detect elements and the spatial distribution of element content in the sample,so the traditional X-ray fluorescence spectrometer cannot detect products at the forefront of scientific research element and element distribution uniformity,thus to evaluate the performance of the product.Therefore,it is of great significance to design and develop a set of X-ray fluorescence microscanning imaging system for the detection,evaluation,improvement of technology and performance of composite alloy,embedded electronic device 3D printing and alloy inkjet printing products.The system consists of an excitation source,an optical path,a computer,a detector,a multi-capillary X-ray optical convergent lens and a three-axis motion control system.Adjustable Ultra Bright96000 excitation source choose energy gamma ray source,choose electric refrigeration X-123,designed by Solid Works 3 d model making light path structure,design of mechanical parts make X-ray source,a capillary X-ray plus lens and detector light path into 90-degree Angle,and the parts assembly model to do simulation of gravity,selection of design and the construction of the three axis motion control,and do the simulation of gravity;The programming program is motion control and characteristic fluorescence collection program.In this paper,the X-ray fluorescence microscanning imaging system is designed.Compared with the traditional X-ray fluorescence spectrometer,the system has the confocal function and microscanning function.The focal spot size of the traditional Xray fluorescence spectrometer is about 2mm,while the focal spot size of the system is 40μm,which is reduced nearly 50 times.The traditional X-ray fluorescence spectrometer is basically fixed except the hand-held X-ray spectrometer.The system has a small displacement of 20μm and a maximum displacement range of 100μm×100μm.Therefore,the minimum resolution of the system is 20μm×20μm,which cannot be achieved by the traditional X-ray fluorescence spectroscopy.In addition,this paper proposes a set of X-ray microscanning and spectral confocal line scanning detection methods,is a kind of inkjet printing,multi-material alloy and other products quality detection methods.