| The Micro-electro-mechanical system(MEMS)has become ubiquitous in people’s lives with the growth of the microelectronics and semiconductor industry.As a micro-actuator,MEMS has low cost,high performance,small size,and high integration and has been applied in fields such as medicinal biology,military defense and electronic communication.Electrothermal MEMS mirror has been widely applied in many instruments such as Fourier transform spectrometers,due to its high accuracy,compatibility and vertical displacement.However,electrothermal MEMS is prone to be affected by environmental circumstances.When the electrothermal MEMS is been blocked for a prolonged period,its initial location would be changed by the external environment.This will greatly decrease the accuracy and reliability of the instrument.In this paper,we have developed a novel bi-directional electrothermal MEMS mirror and analyzed its characteristics.The bi-directional electrothermal MEMS mirror developed in this paper has no fluctuations in initial location with change in the external environment,greatly improving its reliability.In addition,its actuators can drive vertical movements of the mirrors in both directions,thereby improving the vertical displacement.This paper first discussed the status and future outlook of MEMS development,and its principles in electrothermal actuation.We also analyzed the working principles of bimorph-based electrothermal actuators,which gave us theoretical building blocks for our design.We also described the protocol for crafting the bi-directional electrothermal MEMS mirror,and its modeling and simulation.At last,we used optical microscopes and other instruments to test the parameters of the bi-directional electrothermal MEMS mirror and determined its vertical displacement,inclination angle,and natural frequency. |
