Research On Electromagnetic Optimization And High-precision Position Detection Of New Type Micro Linear Motor

In MEMS,it is necessary for the driver to have the characteristics of large displacement,high precision and high response.Compared with the rotating motor,the linear motor has the advantages of high positioning accuracy,fast response speed and large acceleration,which meets the requirements of micro actuator in MEMS.In this paper,a new type of micro linear motor for MEMS is studied,the main contents are as follows.Firstly,the structure and working principle of the micro linear motor are introduced in detail,and the mathematical model of linear motor is deduced after it is equivalent to rotating motor.Then,the paper analyzes the material selection of the rotor permanent magnet,deduces the distribution formula of the rotor magnetic field by Biot-Savart law,and explores the relationship between the magnetic field distribution of the vertical component of the block permanent magnet and the size parameters of the permanent magnet.The electromagnetic modeling and simulation of the micro linear motor proposed in this paper are carried out by Maxwell,and the electromagnetic performance of the micro linear motor is analyzed.The research focuses on the thickness of permanent magnet,coil size of serpentine winding,distance between windings,air gap length.The optimization method of micro linear motor based on the above parameters is explored.The basic size of the micro linear motor is determined.The simulation verifies whether the selection of the motor parameters meets the design requirements of the motor.Next,the different methods of motor position acquisition are compared.In view of the size limitation of the micro linear motor,the TMR sensor is used to detect the magnetic field change during the motion of slider and decode the position signal of the slider.The relationship between the displacement of the slider and the output voltage of the TMR sensor is obtained.Determine the number and installation position of TMR sensors.This paper introduces the basic principle of BP neural network and particle swarm optimization algorithm,and proposes an improved particle swarm optimization algorithm to optimize the neural network to decode the position of the slider.Finally,the important steps of fine micromachining is analyzed.According to the structural characteristics of micro linear motor,the processing route of micro linear motor is formulated.The experimental platform for micro linear motors is built to test the running status of the motor.Through the circuit design and code generation of Simulink to complete the motor position closed-loop control,and verifie the effectiveness of the position decoding algorithm proposed in this paper.