Analysis Of Resources And Environmental Load And Development Of Decision-making Support System Of Sapphire Wafers Ultra-precision Machining Process

Sapphire material has good chemical stability and mechanical and optical properties,and its market demand is increasing.At present,the ultra-precision machining of sapphire wafers is mainly ultra-precision grinding and chemical mechanical polishing,while grinding and polishing are high resources and environmental load manufacturing processes,therefore,it is an inevitable choice for sapphire wafer manufacturers to take the road of green transformation..Green manufacturing process is the fundamental way to solve the problem of high resource and environmental load of sapphire wafer ultra-precision maching process,and is the focus of green manufacturing for sapphire wafer manufacturers.This paper takes the ultra-precision machining process of sapphire wafers as the research object,focusing on the analysis of the resource and environmental load,the multi-attribute decision-making technology and decision-making support system of the sapphire wafers ultra-precision machining process.The main work content is:（1）Taking the sapphire wafers ultra-precision machining as the object,established its IPO（Input-Process-Output）model of process resource and environmental load,and carried out a detailed analysis of the resource and environmental load of the manufacturing process.Based on this,established the process resource and environmental load decision-making index system of sapphire ultra-precision machining.Described the collection method and data processing method of each decision-making index data.（2）Considering the traditional indicators of the manufacturing process and the resource and environmental load indicators comprehensively,proposed a subjective and objective weight analysis method based on the CRITIC（Criteria Importance Though Intercrieria Correlation）method and the expert scoring method,and introduced a multi-attribute decision-making method based on relative entropy to establish a multi-attribute decision model of green manufacturing process.Taking the sapphire wafer ultra-precision grinding process as the research object,designed and carried out the sapphire wafer ultra-precision grinding process experiment,using the multi-attribute decision-making model of the green manufacturing process plan established in this research to make decisions on the grinding process plan,thereby selected the best compromise grinding process plan to guide the production practice.（3）Based on the research of above theories,methods and model,researched and developed a system for resource and environmental load analysis and decision-making of sapphire wafer ultra-precision machining process.The functional requirements of the system were analyzed,and the architecture of the decision support system,the function design of each module and the operation of the system functionre were introduced in detail.