Research On Ultrasound Vibration Polishing Of Quartz Glass Edge

In recent years,more and more large-scale complex splicing optical systems have been used in our life.Even the requivement for mirror processing accuracy and suface quality are improving.The one of major reason limited the splicing optical is the edge quality of each sub-mirror.Quartz glass is widely used in optical components because of its high heat resistance and good light transmission.Ultrasonic vibration polishing as a new type of polishing technology can improve polishing efficiency and improve the surface quality of workpieces after processing.Therefore,the ultrasonic vibration polishing is added to the edge processing of the optical workpiece to provide a new way for the processing of the edge portion of the optical component.In this paper,quartz glass is taken as the research object to study the effect of ultrasonic vibration polishing on the surface quality of quartz glass edge.The main research work of this paper is reflected in the following aspects:(1)To establish the motion displacement equation of single abrasive particle ultrasonic vibration polishing,and draw the motion trajectory map by matlab.the effective abrasive grain number in the polishing process was explored through polishing pad used in this experiment,Further explore the number of effective abrasive grains under different protruding areas during edge polishing;analyze the removal conditions of brittle materials,according to the material removal formula to calculate the crack removal volume per unit time,to calculate The formulas for material removal volume material removal rate of multiple abrasive grains by polishing workpiece cract.Through the derived formula,the parameters affecting the results are studied,and the parameter settings of the later simulation and experiment are determined.(2)The Aabqus simulation software was used to simulate the ultrasonic vibration polishing process of a single abrasive grain.To determine the simulation scheme,to calculate the quartz glass constitutive model,to construct the simulation material library.To simulation the influeence of different ultrasonic amplitude,abrasive particle diameter,feed rate and ultrasonic.To obtain the surface stress change of the workpiece under different parameters,and to analyz the influence trend(3)A multiple sets of comparison experiments to verifie the parameters affecting the surface quality of the workpiece.The experment use 3D scanning electron microscope to surface morphology of the workpiece after machining.To analyz the influence of different parameters on the machining effect of the workpiece,and obtain the optimal parameter combination.(4)To analsis the different edge pressure distribution modelsand the research this subject pressure model.Through the experiment and simulation to explored the ultrasonic polishing edge polishing effect under different protruding head extension areas,and to study the method of improving the edge polishing quality.