Modeling And Error Compensation Of A Novel Five-axis Hybrid Motion Stage

With the rapid development of China's aerospace,automobile,ship,and other fields and the continuous improvement of the level of science and technology,the complexity and processing accuracy of its parts are constantly improving,which po ses technical challenges to its manufacturing equipment,especially to its core moving parts in terms of travel,accuracy,degree of freedom and so on.The five-axis hybrid motion stage has the advantages of large travel and large rotation angle of the ser ies mechanism and high precision and high response speed of the parallel mechanism,which provides the conditions for high-speed and high-precision machining of complex surfaces.Aiming at the comprehensive requirements of the five-axis motion stage in the aspects of travel,accuracy,and degree of freedom,this paper proposes a new five-axis hybrid motion stage structure,carries out the research on the kinematics modeling and error compensation method of the motion stage,establishes its kinematics model and error model,builds the software and hardware system of the five-axis hybrid motion stage,and carries out the calibration,positioning and repeated positioning experiments,The validity of the calibration method is verified.Finally,to further improv e the positioning accuracy of the end of the stage,an error compensation method based on microactuation unit is proposed to clarify the mechanism of micro driving unit and the principle of feedback error correction,and the effectiveness of the microactuation error compensation method is verified by experiments.The main contents of this paper can be summarized as follows1.The research status of the five-axis hybrid motion stage and microactuation error compensation method at home and abroad is investigated,the key problems of multi-axis motion stage and microactuation error compensation technology are identified,and the research content and technical scheme of this paper are determined.2.According to the performance requirements of the five-axis motion stage,a new structure of the new five-axis hybrid motion stage is designed.The relationship between the degree of freedom and mechanics of the parallel port of the five-axis hybrid motion stage is analyzed,and the motion simulation based on MATLAB an d ADAMS software is carried out.The simulation results show that the configuration of the five-axis hybrid motion stage is reasonable and can meet the expected motion requirements.3.According to the mechanical characteristics of the five-axis hybrid motion stage,kinematics analysis and error modeling of the five-axis hybrid motion stage are carried out.The parallel part of 3-PPR is equivalent to three series joints.The five-axis series kinematics model and the parallel part kinematics model of 3-PPR are established respectively to form the kinematics model of the five-axis hybrid stage;Based on the established kinematic equations,the error model is established by total differential method,which provides a theoretical basis for motion control and kinematic calibration of the five-axis hybrid motion stage.4.The five-axis hybrid motion stage system is built,including hardware system and motion software system based on a power PMAC controller.The experimental research of the five-axis hybrid motion stage is carried out,including error measurement,calibration experiment,positioning experiment,and repeated positioning experiment,to verify the performance of the developed five-axis hybrid motion stage and the effectiveness of kinematic calibration.5.To further improve the positioning accuracy of the end of the m oving stage,an error compensation method based on microactuation unit is proposed.The dynamic mechanism of the additional microactuation unit and the feedback error correction principle of the controller are clarified.The trajectory tracking error exper iment based on microactuation unit is carried out.The experimental results show that the method can reduce the tracking error by using the microactuation unit and ensure the stable operation of the motion system,which verifies the effectiveness of the me thod.