Preparation Of Three-dimensional Patterns Of GdBa₂Cu₃O_7-x Superconducting Films

GdBa2Cu3O7-x film has unique electromagnetic transport characteristics,and it has important application prospects in the preparation of superconducting electronic devices.Usually in these applied research,it is necessary to process it into a specific micro-pattern structure and study the multilayer film preparation technology based on GdBa3Cu3O7-x thin film to meet the needs of superconducting microdevices.The traditional etching process often degrades its superconducting performance,and it is difficult to prepare a composite structure with multi-layer micro-patterns.In response to this problem,this paper uses the photosensitive sol-gel method to prepare the GdBCO/Gd2O3/GdBCO three-layer films and its engraved micro-pattern structure through the layer-by-layer micro-fabrication process and the layer-by-layer heat treatment process.The inter-film heat treatment process,phase orientation and electrical properties were explored.The feasibility of its application to the structure of superconducting flux converter is analyzed.The main research work is as follows:(1)By adding the photosensitive modifier benzoylacetone(BzAcH)to prepare GdBCO photosensitive sol with obvious ultraviolet sensitivity.Study the influence of the heat treatment temperature,water vapor duration and other factors in the GdBCO heat treatment process on the phase composition of the GdBCO film,to prepare a single-layer film with excellent superconducting properties.Explore the optimal microfabrication process of GdBCO gel film to prepare high-quality GdBCO bottom layer micro-patterns.(2)Two different Gd2O3 photosensitive sols were configured with propionic acid and diethylenetriamine as complexing agents,and the chelation mechanism and sensitivity of the two sols were studied by ultraviolet and infrared spectroscopy tests.The investigation found that the Gd2O3 sol with propionic acid configuration has better photosensitivity,and the sensitivity rate is significantly improved.After using this formula,the microfabrication process and heat treatment process of Gd2O3 film were explored,and the feasibility of Gd2O3 as a two-layer superconducting intermediate insulating layer and the preparation of micropatterns were studied.(3)The GdBCO/Gd2O3/GdBCO three-layer films structure were prepared by the heat treatment process of decreasing temperature layer by layer,and their growth orientation,film surface condition and superconducting properties were characterized.The preparation process of the three-layer film is further combined with the overlay technology to prepare the GdBCO/Gd2O3/GdBCO three-dimensional fine pattern.Further explore the feasibility of this microfabrication method to prepare superconducting flux converters.