Study On Preparation Of Metalloid Co₂FeAl Films And Its Magnetic Control

In recent years,the excellent high-frequency electromagnetic properties of soft magnetic materials have been widely used in network communications and artificial intelligence industries.The soft magnetic material with in-plane magnetic anisotropy can optimize its resonance frequency.The greater the in-plane anisotropy,the higher the controllable resonance frequency.How to achieve in-situ control of the in-plane magnetic anisotropy of soft magnetic materials has become an important part of obtaining high-frequency characteristics of soft magnetic materials.The electric field control has the characteristics of low energy consumption and localization,and has become the first choice to control the magnetic anisotropy of soft magnetic materials.The Metalloid Heusler alloy Co₂FeAl soft magnetic material shows great application potential due to its high Curie temperature,high spin polarizability,and low damping factor.Therefore,in this paper,magnetron sputtering is used to prepare Co₂FeAl alloy films with a good degree of order,and to explore the regulation mechanism of the external electric field on the in-plane magnetic anisotropy of Co₂FeAl alloy films.Get the following conclusions:(1)Obtain a Co₂FeAl alloy films with a good degree of order.Co₂FeAl thin films were prepared on different substrates by magnetron sputtering.The effects of different sputtering power,substrate temperature,and sputtering thickness on the crystal structure of Co₂FeAl thin films were investigated by scanning electron microscope(SEM)and X-ray diffractometer(XRD)testing methods.As the sputtering power increases and the substrate temperature increases,the crystallinity of the Co₂FeAl alloy film is improved.However,when the sputtering power is too high is too high,the lattice order of the Co₂FeAl alloy film decreases.And as the thickness increases,a more ordered Co₂FeAl alloy film with a lattice structure can also be obtained.(2)Realize the regulation of the in-plane magnetic anisotropy of the Co₂FeAl alloy film by the stress mechanism.Magnetron sputtering was used to prepare a Co₂FeAl alloy thin film with good order on a single crystal PMN-PT substrate.In the Co₂FeAl/PMN-PT multi-iron heterojunction,through the VSM static magnetic test,it is found that with the change of the applied electric field,the in-plane magnetization rotates by 90°,which is consistent with the change trend of the stress with the electric field,at the same time,the FMR dynamic Similar results were obtained from the magnetic test,so this phenomenon is attributed to the stress mechanism.