High Temperature Properties Of TiAlSiN Film

TiAlSiN film not only has excellent mechanical properties at room temperature,but also has excellent oxidation resistance and thermal stability at high temperature,which makes it widely used in machining?tooling and other fields.Cathodic arc ion plating technology has been used to prepare TiAlSiN film due to its high ionization rate?high deposition efficiency and excellent bonding strength.In this study,TiAlSiN film were deposited on M2 high speed steel by cathodic arc ion plating.This paper is intend to research the influence of deposition bias on the structure?wear resistance?mechanical properties and oxidation resistance of TiAlSiN film.Firstly,the preparation process of TiAlSiN film was optimized;then,the structure and properties of TiAlSiN film after multiple thermal shock cycles were studied;the friction and wear behaviors of TiAlSiN film at different temperatures(room temperature,600?,700?,800?)were studied,The wear mechanism of the film was discussed,and the high temperature properties of TiAlSiN film were studied to provide theoretical and data support for its engineering application.The results show that:The film was HCP Al N phase at 50V bias voltage.;75V?bias voltage?150V,the film was mainly solid solution(Ti,Al)N phase.When the bias voltage was 100V,the comprehensive properties of film were excellent.The adhesion of the film was 46.7N;hardness was 3276HV_0.025;Surface roughness was the lowest;wear resistance was the best,friction coefficient was 0.69,wear rate was 1.16×10^-14m³·N^-1·m^-1;and the anti-oxidation was the strongest at high temperature.TiAlSiN film was oxidized for 10min at 600?and then cooled in water for several times.Thermal shock cycle increased from 0 to 50,the structure of the film remains cubic all the time.After Al atom entered the(Ti,Al)N lattice,substitutional solid solution was formed.the main diffraction peak in the XRD diffraction pattern shifted to the left.With the increased of thermal shock times,oxidation particles increased,the surface quality becomes worse,hardness and adhesion of the film decreased.However,due to the formation of oxide on the film surface after multiple thermal shock,Oxide played a lubricating play a role of friction lubrication in the friction and wear test,greatly slowing down the severe friction between the film and the friction pair,and the wear rate of TiAlSiN film was lower after multiple thermal shocks..In the process of high temperature friction and wear,TiAlSiN film has low friction coefficient and high wear rate.Ti O₂?Al₂O₃ and other oxides formed in the wear mark,Oxides play a lubricating role in the wear process.The results show that the average friction coefficient were 0.81?0.7?0.62?0.5 at room temperature?600??700??800?,respectively.The wear rate of the film is 7.48×10^-14m³·N^-1·m^-1 at 800?,which is 5.09 times of that at room temperature.