Effect Of Nitrogen Flow Rate Of High-entropy Alloy Nitride Films By Sputtering

High entropy alloy nitride film is a new type of multi-element alloy nitride film,which is composed of five or more metal components with equal or nearly equal molar ratio and nitrogen.It is found that high entropy alloy nitride film has great advantages in traditional mechanical,thermodynamic,electromagnetic and chemical stability,and has high development and application value.The effect of nitrogen flow rate on the structure and mechanical properties of high entropy alloy nitride films prepared by magnetron sputtering is the focus of research.However,there are few reports on the comparative study of the structure and mechanical properties of high entropy alloy nitride films containing one and two kinds of nitrogen sparing components,In this paper,(AlCoCrNiMo)N_x thin films and(Al Ti Cr Ni Mo)N_x thin films were prepared by Ion Beam Assisted Magnetron sputtering.The effects of nitrogen flow rate(R_N)on the microstructure and properties of(AlCoCrNiMo)N_x thin films and(Al Ti Cr Ni Mo)N_x thin films were studied.The conclusions are as follows(1)For(AlCoCrNiMo)N_x films,the deposition pressure increases with the increase of R_N;The deposition rate is the fastest at 10%;The content of Co and Ni are much lower than that of Al and Cr.(AlCoCrNiMo)N_x thin films are amorphous as a whole,but small peaks are found when R_N=30%;The results show that the structure of the films are relatively loose,showing I-type,and the density decreases with the increase of R_N.The change trend of cross-section morphology are Ic type→Ib type→Ia type;With the increase of R_N,the hardness of the films first increases,then decreases,and finally remains unchanged.The effective Young’s modulus first increases and then decreases;The films wear first decreases and then increases,and finally decreases and remains unchanged.Under the experimental conditions,when R_N=10%,the film has the highest hardness and the lowest wear rate.(2)For(AlTiCrNiMo)N_x films,the deposition pressure increases with the increase of R_N;The content of Ni is lower than that of other components;The deposition rate first decreased and then increased,and finally decreased and then remained unchanged;With the increase of R_N,the films structure change from amorphous to single FCC crystal;With the increase of R_N,the density of the films first increases and then decreases.The films with R_N=10%have the most compact structure and belong to T-type structure,while the films with other R_N are all I-type;The hardness and effective Young’s modulus of the films increase rapidly at first,then decrease gradually,and remain unchanged at last;The films wear first decreases,then increases,and finally decreases gradually.When R_N is 5%,the hardness of the film is the highest and the wear rate is the lowest.(3)Compared with(AlCoCrNiMo)N_x and(AlTiCNiMo)N_x films,the structure and properties of(Al Ti Cr Ni Mo)N_x films change more obviously with the increase of R_N,(Al Ti Cr Ni Mo)N_x films have higher deposition rate.The crystallization trend of(Al Ti Cr Ni Mo)N_xfilms are higher than of(AlCoCrNiMo)N_x films.The mechanical properties of(Al Ti Cr Ni Mo)N_xfilm are better than(AlCoCrNiMo)N_x films.