| CrN coatings get much attention due to its low internal stress,good toughness,high chemical stability,good corrosion resistance,and high bonding strength to the substrate during the preparation process and fast deposition rate.Although the CrN coating prepared by the magnetic sputtering method has the advantages of good film-based bonding,etc.,it exposes many internal defects and other problems,affecting the quality of the coating.HiPIMS has the advantages of high target isolation rate,low duty cycle,and compact film,which can improve the performance of CrN coating.In addition,under more severe application conditions,even if the quality of the CrN film is improved,the hardness and wear resistance of the binary coating still cannot meet the requirements,which limits the development of the CrN coating.Therefore,in order to improve the mechanical and tribological properties of CrN-based coatings,in this paper,CrN-based coatings are deposited by HiPIMS to study the properties of different CrN-based coatings.The main conclusions are as follows:(1)When the bias voltage is-300V,the hardness and elastic modulus of the CrN coating are the largest,which can reach 16.1GPa and 281.7GPa,respectively.This is related to the coating structure,grain size,internal stress and other parameters.The wear performance of CrN coatings with different bias voltages is different;when the bias voltage is 0V,the friction coefficient of the CrN coating is about 0.7.After the bias voltage is applied,the friction coefficient changes between 0.58?0.66.When the bias voltage is-300V,the CrN coating has the best wear performance,the lowest coefficient of friction,and its wear rate reaches the lowest value,which is 8.91×10-8 mm3·N-1·m-1.The CrN coating prepared under the bias voltage of-300V has the best corrosion resistance,the lowest corrosion current density,which is 0.497?A/cm2,and the protection efficiency of the substrate is 88.69%.(2)The CrSiN coating deposited by HiPIMS+RF process has the highest elastic modulus and hardness,which are 241.7GPa and 11.3GPa,respectively.The wear properties of CrSiN coatings prepared by three kinds of processes are different.The friction coefficient is in the range of 0.4?0.55.But the wear rate of CrSiN Coating grown by HiPIMS+RF is the lowest,which is 5.0×10-6 mm3·N-1·m-1.The cross section of the CrSiN coating deposited with the HiPIMS+RF exhibits a much denser columnar structure.It shows the best corrosion performance,the lowest corrosion current density of 3.21×10-7 A·cm-2 and the protection efficiency of 92.42%.(3)The hardness and modulus of elasticity of CrN/ZrN multilayers are increased by multilayer structure.When?=1280nm,the hardness and elastic modulus of CrN/ZrN coatings are the lowest,which are 12.17GPa and 267.1GPa,respectively.When?=640?320?160?80nm,the hardness and elastic modulus values increased to varying degrees,but the values remained basically the same without significant increase or decrease,which were about 16GPa and 280GPa,respectively.When?=1280nm,the corrosion current density of the CrN/ZrN coating is 1.97×10-7A·cm-2,and the porosity and protection coefficient are 3.34%and 95.34%,respectively.When?=640?80nm,it shows Better corrosion resistance,the lowest at?=80nm,can reach 3×10-8A·cm-2,the porosity and protection coefficient reach 0.72%and 99.28%,respectively,and the protection efficiency of the coating is greatly improved. |
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