| Organic light-emitting diodes（OLEDs）have a broad market prospect in flexible displays field.Nevertheless,the electrode and organic materials of OLEDs are sensitive to water vapor and oxygen in the air and needs to be protected from degradation.Inorganic-organic hybrid film has the potential of for high barrier performance and flexibility,which is suitable for OLEDs encapsulation.Based on the optical theory,the transmission matrix method is used to calculate the transmittance of the thin film.The effects of refractive index and thickness of the film on the transmittance of the film is studied and explained.On this basis,the antireflection structure of the Al2O3-Alucone hybrid film based on PEN substrate is designed.The transmittance of2 to 5 layers of Al2O3-Alucone multilayer thin films with different sub layer thickness is calculated,and all kinds of structures can be higher than 99%in a certain thickness range,which is 9%higher than that of the substrate.The 3-layer and 5-layer film structures are ideal antireflective structures with wide antireflection thickness range,small film sublayer thickness and small transmittance fluctuation.Al2O3 and Alucone thin films are prepared by atomic layer deposition and molecular layer deposition.Based on the results of transmittance calculation and process factors,the structure of 20nm Al2O3/8nm Alucone/20nm Al2O3ultrathin hybrid thin films is designed and its packaging performances are tested.The water vapor permeability of the films is 2.03×10-4g/（m2·day）by the electrical test method of calcium film.By bending fatigue test,the results show that the hybrid film can reduce the crack density of Si3N4 film by 14.8%.The UV-Vis test shows that the transmittance is 4.34%higher than that of the substrate,which is consistent with the calculation.Finally,the hybrid film is encapsulated directly on the device to test the reliability,which verifies the actual encapsulation performance of the hybrid film. |
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