The Preparation Of Transparent Porous ZnO Film And The Study Of Optical Properties

Zinc oxide(ZnO)is a wide band-gap semiconductor materials,with good c-axis orientation,high resistivity,good optical properties.ZnO thin film has good transparent conductive,piezoelectric,photoelectric,gas sensitivity,pressure sensitive resistance,and suit for gas detection,liquid crystal imaging,ultraviolet light,camera technology,and easy integration with a variety of semiconductor materials.The main preparation methods of ZnO thin film were magnetron sputtering,chemical vapor deposition,spray pyrolysis,sol-gel method,and both have advantages and disadvantages.This paper studies the preparation of porous ZnO thin film,made a series experiments of uniform and transparent sol gel,including: adding tackifier in reaction solution,testing a variety of process;adopting coating method;Different heat treatment process and adopting the calcinations.In order to further study the major factor of surface morphology of ZnO thin films,experiment using SEM,TEM,XRD,laser confocal microscope,spectroscopic ellipsometry analyze porous membrane microstructure,morphology,crack,grain growth.This paper put forward a method to improve the structure and properties of thin films by changing the concentration of additives,adding the appropriate concentration of short chain PEG2000.To study the optical properties of porous ZnO transparent thin film,the sample was deceted by spectroscopic ellipsometry,spectrophotometer and ultrathin membrane permeability simulation analysis.The results show that the ZnO film thickness is about 150-190 nm,presenting exert strong transparency.with the increase of concentration,the porosity and the refractive index of porous membrane is about in a range of 1.5 ? 1.7,the transmission rate can be increased to more than 95%,and other optical properties have further improved.