Research On Integrated Design Of Photonic Devices And Systems For Interferometric Imaging Detection

With the development of optical detection and the rapid development of Semiconductor industry,people have put forward higher and higher requirements on the performance of optical detectors.Based on interference detection principle,the use of photonic integrated devices as a means of signal transmission photonic integrated interference imaging system with high resolution,small volume,light weight,low power consumption,development potential is huge,is expected to breakthrough the limitation of traditional large caliber monomer telescope,solve the contradiction between resolution and phase volume restriction,to probe at a distance.Based on the principle of interference imaging,this paper studies the design method of key photonic integrated devices in the interference detection system by using the beam propagation method,and designs a complete photonic integrated chip.An electronic prototype design method based on photonic integrated chip is proposed to improve optical resolution effectively.The main research work of this paper is as follows:（1）Interference imaging theory and photonic integrated design method are analyzed.Based on the Fansitt-Zernick theorem,the interference imaging technology based on microlens array is introduced,and the relationship between the spatial coherence of light source radiation field and intensity spectrum distribution is explored,as well as the principle of photonic integrated interference imaging.Then the advantages and disadvantages of the effective refractive index method,beam propagation method and finite difference time domain method are analyzed.（2）Design and optimization of photonic integrated chip based on silica waveguide.Design optical path respectively based on the beam propagation method,phase matching,array waveguide grating coupler modulator,edge and photonic integrated devices such as multimode interference couplers,and according to the integrated photonic integrated devices designed photonic integrated chip,because power consumption is higher,the size is too big,etc,therefore put forward based on the modified silicon waveguide.（3）Photonic integrated chip design based on silicon waveguide.Silicon waveguide is used to design key photonic integrated devices to realize miniaturization and refinement of photonic integrated chips.Meanwhile,low-loss Silicon nitride waveguide is used to realize long-distance transition coupling between microlens array and photonic integrated chips.The layout design,power consumption calculation and performance analysis of the photonic integrated chip and the shrink guide chip are carried out in detail.（4）A compact high-resolution electronic prototype of photonic integrated interference detection system.First according to the micro lens array is put forward a feasible way of baseline configuration,and then used in micro lens focal plane twodimensional optical waveguide array,in order to enhance viewing Angle and the imaging quality,in the end,based on the silicon waveguide photonic integrated chip simulation design of photonic integrated structure model of electronic interference detection system prototype,and its performance compared with the traditional optical telescope,The advantages and disadvantages of photon integrated interference detection system are demonstrated.