Simulation And Experiment Of Femtosecond Laser Direct Writing Tin Dioxide Micro-nano Structure

Femtosecond laser is the shortest pulse laser currently available in the field of micro-nano processing.Its ultra-high instantaneous power and ultra-short pulse enable it to be cold processed,and its ultra-high precision allows it to process micro-nano-level samples.It has an irreplaceable role in physics,biology,chemical control reaction,optical communication,medicine and other fields.Tin dioxide is an important semiconductor material with many excellent characteristics in gas sensor and catalysis and so on.This article will study the femtosecond laser direct writing tin dioxide micro-nano structure from simulation and experiment:1.Analyze the process of femtosecond laser direct writing tin dioxide through theory and simulation.From the perspective of energy transfer,the feasibility of the femtosecond laser acting on the stannous chloride sol-gel film to generate tin dioxide is analyzed,and then the two-temperature model is established and optimized.The finite element analysis method is used to simulate the temperature changes of electrons and lattices when the femtosecond laser interacts with matter.Simulation shows that the electron temperature reachs a peak at about 200 fs under laser action and drop rapidly,and the lattice temperature reaches a peak at about 4.3 ps and tends to balance with electrons.At about 0.4 ns,the entire system has returned to room temperature before the next laser pulse is applied.The multi-pulse action process of femtosecond laser is a cyclic process of rapid temperature rise and fall.2.The micro-nano structure of tin dioxide was prepared by femtosecond laser direct writing experiment.First,femtosecond laser was used to act on the stannous chloride sol-gel film to successfully fabricate 1?m tin oxide lines,which were characterized by multiple methods such as SEM,XPS,micro-XRD,and high-resolution TEM.Subsequently,the tin dioxide micro-nano device was designed and fabricated,and its electrical performance test,gas sensitivity test and photoelectric performance test were carried out.The prepared tin dioxide micro-nano device can be turned on,and the current is in the order of 10^-8 when a voltage of 1V is applied;the response value to10 ppm H₂S is 1.6,the response speed is faster,about 10 s,and the recovery time is 100s;It responds and recovers to ultraviolet light in more than one minute,with repeatability.