Optimal Design And Data Processing Method Of Chromatic Confocal Line-scan Measuring Instrument

Displacement sensor is the key technology to realize the precise measurement of geometric parameters in mechanical manufacturing.The spectral confocal displacement sensor line scanning measurement technology is a new type of spectral confocal displacement sensor.The spectral confocal displacement sensor is a new and reliable photoelectric measurement technology.Its non-contact characteristics can achieve the nondestructive measurement of the sample surface.After adding the imaging technology,each point on a line can be measured and reconstructed at a single time,Get the basic outline of the line.It is widely used in many fields such as industry and medical treatment,and represents the development direction of advanced displacement sensor.This paper focuses on the measurement error analysis and data processing method of spectral confocal line scanning ranging system:1.The design requirements and target parameters of the dispersion lens group of the white light confocal line scanning ranging system are analyzed,and the optimization design of the double telecentric dispersion lens group is completed.The optical design software is used to further complete the simulation analysis,optical performance analysis,tolerance analysis and yield analysis of the optical path of the white light confocal line scanning ranging system;2.The design of the reference light path of the light source is proposed and completed to suppress the influence of the instability of the light source on the measurement results.The reference light path is drawn from the light source to observe the spectral distribution jitter of the light source in real time,which is used as the contrast of the peak image.The subsequent algorithm is used to reduce the jitter of the peak image and suppress the instability of the light source in real time;3.The calibration of spectral confocal line scanning ranging system is completed.The aberration correction method in the imaging profile scanning measurement and the light intensity calibration method caused by the loss of transmitted light intensity due to the roughness of the spectrometer slit are proposed to improve the accuracy of the measurement.The inevitable aberrations caused by the defects of the optical system are corrected,and the slight bulge to one side in the profile fitting diagram is repaired.The contour images at different positions are fitted,and the correction parameters at different positions in the corresponding space are obtained.According to the similar dark fringes in the imaging spectrum caused by the rough slit.By calculating the compensation and correction parameters of the transmitted light intensity,the accuracy of the measurement system is improved.4.The function and accuracy of the spectral confocal line scanning ranging system are verified by the contour measurement experiment.The spectral peak value extraction and random noise filtering are completed by using the spectral fitting data processing method based on mean shift theory and the algorithm based on Wiener filter,respectively.The spectral data extraction and random noise filtering are completed,and the dithering noise of fitting contour is eliminated.