| Terahertz(THz)microstructures passive devices are generally made of Au metal or low-loss dielectric materials.When the size of the microstructures is fixed,it is difficult to control the terahertz wave by adjusting the properties of the microstructures.In this paper,the mirror-asymmetric split-ring microstructures with the high-quality factor based on the magnetic Fe NHf film and Au film were designed and fabricated by the semiconductor micro-nano technology.The soft magnetic Fe NHf film had the characteristics of the low magnetic anisotropy and high permeability,which could be modulated by the external magnetic field.The influence of the dimension and magnetization of the magnetic microstructure on the properties of terahertz wave transmission,such as refractive index and Q-factor,were systematically studied in the terahertz magnetic microstructures.The details of contents were listed as following,1.The mirror-asymmetric split-ring microstructures were modeled by the finite difference time domain method(FDTD).The dimensions,the direction of the THz electromagnetic field and permeability of the magnetic microstructures were the tunable parameters in the simulation.The influence of parameters of the microstructures on the terahertz wave transmission performance and terahertz resonance models were systematically studied.2.The mirror-asymmetric split-ring structures based on the Au film and magnetic Fe NHf film,respectively,were fabricated based on the semiconductor technology.At the same time,the THz transmission of Au and magnetic mirror-asymmetric split-ring microstructures were measured under the external magnetic field 100 Oe by the terahertz time domain spectrum system(THz-TDS).The terahertz transmission properties of Au and magnetic Fe NHf microstructures were studied with the change of the direction of magnetization by applying 100 Oe external magnetic field.3.Based on the simulation and experiments results,the terahertz transmission properties and terahertz resonance models were studied in the mirror-asymmetric split-ring microstructures with the Au film and the Fe NHf magnetic film,respectively.The terahertz modulation performance and terahertz wave loss of the magnetic microstructures were studied with the change of the dimension and the applied external magnetic field.By the analysis of the terahertz transmission spectrum and the terahertz electric and magnetic field distribution in the mirror-asymmetric split-ring structures,the terahertz modulation mechanism was clarified in the magnetic Fe NHf microstructures under the magnetic field.The present experiment and simulation are helpful to understand the physical mechanism of tunable terahertz magnetic microstructures.At the same time,this study of the tunable terahertz magnetic microstructures provides the insight research of terahertz passive devices. |
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