Development And Characteristics Of Superluminescent Diode Based On Quantum Well

Superluminescent diode(SLD)have become to important applications for optical communication(OC),fiber optic gyroscope(FOG),defense and industry,biomedicine,sensing,due to high power,larger optical spectrum width,low coherence.The 1.3 ?m SLD for system of high signal-to-noise ratio such as OC and FOG,in this paper,the J-type waveguide SLD with 8° bending angle,the device length of 2.5 mm,the output spectrum width of 10 nm and the output power of 42.2 m W under the continuous injection current of500 m A at room temperature;the tilt type waveguide SLD with 7° tilt angle and the device length is 2.5 mm,the output spectrum width of 13 nm and the output power of 40 m W under the continuous injection current of 600 m A at room temperature.We carried out research work for device structure design,fabrication and output performance research which waveguide structure parameters,insulating layer thickness,etching and electrode coating,and testing of output performance,the follow of detailed work about this paper :(1)Simulation and Fabrication,1.3 ?m SLD waveguide structure for J-type and tilt-type were designed by simulation,starting from the theory,the effect of parameters to output performance of SLD was systematic analyzed,such as etching depth,bending angle of J-type waveguide and tilt angle of tilt type waveguide,insulating layer thickness,and the fabrication of devices was guided according to the simulative results;In fabrication processes,the fabrication of ridge waveguide by dry etching combined with wet etching wet etching,the problems that the breakage of metal electrode on side wall of waveguide due to principle of Electron Beam Evaporation was limited were solved by Magnetron Sputtering on P electrode,others parameter of fabrication were optimized.It was safeguard that every processes of fabrication were completed with high quality in order to high output performance of SLD was obtained.(2)The testing of device and analysis of performance,design,fabrication and test of SLD with J-type and tilt-type waveguide.The bending angle of J-SLD contains 7° and 8° which various lengths of straight waveguide,the influence of different length of straight waveguide to the output performance of SLD was studied under the same as bending angle and other structural parameters of J-type;The influence of different bending angles to the output performance of SLD was researched under uniform length of straight waveguide.In this paper,tilt-type SLD with three kinds of tilt angle(6°,7° and 8°)were designed and fabricated,the influence of different tilt angles to the output performance of SLD was analyzed.