Design And Performance Analysis Of Metasurface Optical Devices Based On Optical Module Integration

High-power semiconductor lasers have many broad applications in many fields,and have the advantages of light weight,small volume,long life and high photoelectric conversion efficiency.In optical communication system,according to the current light module on the development trend of miniaturization,integration application demand,as one of the main components of the semiconductor laser as light source in the optical module is indispensable importance,but in the inside of the semiconductor laser waveguide is mainly composed of asymmetric structure,make the light beam in the fast axis and slow axis can make light beam in the process of change,and will make its have the certain Angle and light,there exist some differences in size,so we need for semiconductor laser output beam wavefront plastic regulation,in order to realize the application in the development of optical communication module in the future.So there is need to use the optical system,but most of the optical system do not accord with the demand of the miniaturization,integration,in order to achieve the 808 nm edge emitting laser light spot of this article for regulation of wavefront plastic is made of super surface of laser beam wavefront control study,implementation of laser beam optical systems to achieve miniaturization and higher integration requirements.In this paper,quartz glass(Si O₂)with low reflectance and absorption characteristics in the near infrared band was used as the substrate to carry out the structure design of the metasurface device,the technological process and the wave-front regulation performance research work,to achieve the metasurface lens to the laser beam regulation function.Plasma Enhanced Chemical Vapor Deposition(PECVD)technology is used to grow a layer of amorphous silicon(?-Si)on the substrate with a thickness of 350nm.Micronano processing technology is used to anneal the amorphous silicon,and the annealing treatment can eliminate the internal stress of the film,thus improving the adhesion of the film.Through theoretical calculation and simulation analysis,eight groups of cylindrical structures with different radii and a period of 280nm and a structure height of 350nm were designed.In the process of micro-nano machining,electron beam exposure technology was used to lithograph the metasurface pattern,photoresist was used as the mask,combined with the technology of plasma etching(NLD)to fabricate the metasurface structure,and the metasurface lens device was successfully fabricated.Finally,the control of the beam by the metasurface device is realized.Based on the above research,we have designed an arbitrarily polarized multi-focus hyperlens,which can correlate the target polarization and independent phase modulation with the nanostructure parameters.The multifunctional metasurface with independent function and polarization can be constructed by controlling the phase and polarization of light independently at the same time.The multifocal metasurface lens with arbitrary polarization from 2 to 5 focal points,including linear polarization,circular polarization and elliptic polarization,is studied.In addition,the intensity ratio between the focal points can be changed by adjusting the number of different nanostructures.This design provides a new way to achieve ultra-thin,high-efficiency metasurfaces that can be used in many potential applications,including polarization images,multiplexing communications and multidimensional holograms.