Experimental Research On A Microprobe Device For Surface Scratch Detection

The high-integration development of electronic products present higher demand for their surfaces,such as including the surface precision of chips and wafers and other factors which directly affect their quality.Therefore,the development of a microprobe detection device used for detecting the surface damage(crack and scratch)has become a technical problem that must be solved.On the basis of related study at home and abroad,this paper designs the integrated design of the microprobe system based on the constructed dual-frequency laser heterodyne interference system.It consists of a microprobe integrated module,dual-frequency laser interference module,a sample scanning table and a data processing module.The microprobe integrated module is designed to use spring-screw structure to realize the smooth and continuous adjustment of the position and angle of the rigid body of a microprobe.It also uses one-dimension displacement flexible hinge mechanism to realize one-dimension precision displacement of the microprobe in certain direction.Meanwhile,a piezoelectric ceramic signal source for microprobe vibration is designed to make the presetting of signal parameter vibration possible.Thus,as an optical element and a force sensor,the microprobe module can realize the laser reflection and collimation on microprobe,and control the vibration and precision displacement of microprobe.The established microprobe device is studied experimentally.First,self-examination design and collimation control are carried out for its dual-frequency laser path.Secondly,thermal noise experiment is employed to detect the inherent frequency of the microprobe.Finally,the vibration forces response of the microprobe are tested.Moreover,the finite element method is used to simulate the mode of vibration microprobe and mechanic response.The experimental results are compared with the simulation results.The resonant frequency is 16.94 k Hz and 16.81 k Hz respectively,and the force response curve linearity is 0.97283 and 0.99996 respectively.The experimental results show that the vibration response and force response of the microprobe basically corresponds to its simulation results.The microprobe device can be used to detect the surface scratch,and the integrated design of microprobe device is also feasible.