Optimization Design Of MEMS Bionic Vector Hydrophone

MEMS bionic vector hydrophones have the advantages of small size,low power consumption,good low-frequency response characteristics,and the ability to achieve single orientation.It provides options for improving the combat capabilities of small platforms such as torpedoes,UUVs,and airdrop buoys.However,MEMS vector hydrophones still have problems such as low sensitivity and poor anti-vibration performance.Therefore,this paper mainly optimizes the sensitive microstructure and packaging design of the MEMS vector hydrophone to achieve the effect of being flexibly applied to small underwater combat platforms.The main research content includes hydrophone sensitive structure design,theoretical analysis,simulation analysis,fabrication,packaging design and performance testing.Firstly,the microstructure of the hydrophone is optimized.In this paper,hollow cilium cylinder vector hydrophone(HCVH)is presented,which can improve sensitivity and working bandwidth within a certain range.Acting as the received acoustic signal structure,a hollow cylinder can not only ensure that sensitivity is improved by increasing the size of area which receives sound,but also reduce its weight to improve the stability of hydrophone.The simple structure can ensure the consistency of mass production of hydrophones.The rationality of the hollow cilium cylinder design was verified by simulation.At the same time,another differential type cilia microstructure was designed.By designing the symmetrical structure of hydrophone cilia,it has better mechanical symmetry to realize the cancellation of vibration signals.When the low-frequency vibration signal and the acoustic signal have the same frequency,the vibration interference cannot be removed by narrow-band filtering.This structure can effectively suppress vibration interference and improve the signal-to-noise ratio.It is mainly used to suppress the vibration and noise of the platform,improve the signal-to-noise ratio and impact resistance of the hydrophone,so that it can be rigidly fixed on platforms such as UUV.Secondly,the hydrophone package structure is analyzed theoretically.The hydrophone package tube shell is optimized.In order to solve the problems of air bubbles in the hydrophone packaging process,the vacuum oil filling program was designed and a platform was built.It can improve the consistency of hydrophone production and the ability to withstand hydrostatic pressure.Finally,a series of performance tests were carried out on the produced hydrophone.Using the standing wave tube calibration system,the comparative calibration method is used to calibrate the sensitivity and directivity of the produced hydrophone.A series of environmental adaptability tests such as hydrophone resistance,anti-vibration and impact resistance are carried out by using marine static pressure environment simulation test machine,vibration and shock sensor automatic calibration system,high-power shaker and standing wave tube calibration system.which lays the foundation for further engineering applications.It can establish the foundation for performance optimization and engineering applications of hydrophones.