| The amplitude-frequency response and voltage-amplitude response of electrostatically actuated micro and nano-electromechanical systems (M/NEMS) clamped circular plates are investigated. The system is actuated under soft AC voltage at frequency near half primary natural frequency and near primary natural frequency of the plate. This results in primary and parametric resonance of the system respectively. The system is first analytically modeled using the Method of Multiple Scales (MMS), and results are then compared to numerical simulations using Reduced Order Model (ROM). Obtained results from ROM are then verified using numerical time responses. The effects of nonlinearities of the system including pull-in instability are investigated. The influence of multiple parameters including excitation frequency, voltage, damping, Casimir force, and van der Waals force are reported in the micro and nano scales. |
