| The field of electronic sensors has witnessed a tremendous growth over the last decade particularly with the proliferation of mobile devices. New applications in Internet of Things (IoT), wearable technology, are further expected to fuel the demand for sensors from current numbers in the range of billions to trillions in the next decade. The main challenges for a trillion sensors are continued miniaturization, low-cost and large-scale manufacturing process, and low power consumption. Traditional integration and circuit design techniques in sensor systems are not suitable for applications in smart dust, IoT etc.;The first part of this thesis demonstrates an example sensor system for biosignal recording and illustrates the tradeoffs in the design of low-power miniaturized sensors. The different components of the sensor system are integrated at the board level. The second part of the thesis demonstrates fully integrated sensors that enable extreme miniaturization of a sensing system with the sensor element, processing circuitry, a frequency reference for communication and the communication circuitry in a single hermetically sealed die. Design techniques to reduce the power consumption of the sensor interface circuitry at the architecture and circuit level are demonstrated. The principles are used to design sensors for two of the most common physical variables, mass and pressure. A low-power wireless mass and pressure sensor suitable for a wide variety of biological/chemical sensing applications and Tire Pressure Monitoring Systems (TPMS) respectively are demonstrated. Further, the idea of using high-Q resonators for a Voltage Controlled Oscillator (VCO) is proposed and a low-noise, wide bandwidth FBAR-based VCO is presented. |
