Design and analysis of series and shunt MEMS switches

This thesis presents series and shunt RF Micro-Electro-Mechanical (MEMS) switches and varactors, emphasizing the electromagnetic modeling and design as well as mechanical modeling. Comprehensive modeling and design are verified by extensive fabrication and testing of both series and shunt MEMS devices. These devices were implemented into high-isolation (−60 to −40 dB from 2 to 40 GHz) switch circuits. Also, a detailed electro-mechanical 1-dimensional dynamic simulation has been done for MEMS switches and varactors. It is also the author's goal to establish general performance parameters and limitations of MEMS devices.